Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants
Transferred, Ultrathin Oxide Bilayers as Biofluid Barriers for Flexible Electronic Implants
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转移的超薄氧化物双层作为柔性电子植入物的生物流体屏障
DOI：
10.1002/adfm.201702284
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发表时间：
2018-03
影响因子：
19
通讯作者：
Rogers J.A.
中科院分区：
文献类型：
--
作者：
Song E.;Lee Y.K.;Li R.;Li J.;Jin X.;Yu K.J.;Xie Z.;Fang H.;Zhong Y.;Du H.;Zhang J.;Fang G.;Kim Y.;Yoon Y.;Alam M.A.;Mei Y.;Huang Y.;Rogers J.A.
本文介绍了一种材料策略，该策略涉及物理转移，在硅片上热生长超薄二氧化硅（SiO2）层，然后通过原子层沉积涂覆氧化铪（HfO2），作为满足最具挑战性的柔性电子设备要求的屏障。与这种双层膜相关的水解和离子传输的材料和物理方面决定了它们的性能和可靠性特征。系统的实验研究和反应扩散模型表明，即使有一定密度的针孔，HfO2膜也会以数量级的速度减缓下层SiO2的溶解，而与周围生物流体中离子的浓度无关。在pH值为7.4的磷酸盐缓冲盐水溶液中，在恒定的电偏压下浸泡的加速试验表明，这种双层屏障也可以阻碍离子的传输，否则会导致电子设备操作中的漂移。理论漂移-扩散模型定义了溶解和离子扩散的耦合，包括它们对器件寿命的影响。在薄而灵活的电子测试结构中，这种具有无源和有源元件的屏障的演示突出了在慢性生物集成设备中广泛应用的潜在优势。
The work presented here introduces a materials strategy that involves physically transferred, ultrathin layers of silicon dioxide (SiO2) thermally grown on silicon wafers and then coated with hafnium oxide (HfO2) by atomic layer deposition, as barriers that satisfy requirements for even the most challenging flexible electronic devices. Materials and physics aspects of hydrolysis and ionic transport associated with such bilayers define their performance and reliability characteristics. Systematic experimental studies and reactive diffusion modeling suggest that the HfO2 film, even with some density of pinholes, slows dissolution of the underlying SiO2 by orders of magnitude, independent of the concentration of ions in the surrounding biofluids. Accelerated tests that involve immersion in phosphate‐buffered saline solution at a pH of 7.4 and under a constant electrical bias demonstrate that this bilayer barrier can also obstruct the transport of ions that would otherwise cause drifts in the operation of the electronics. Theoretical drift–diffusion modeling defines the coupling of dissolution and ion diffusion, including their effects on device lifetime. Demonstrations of such barriers with passive and active components in thin, flexible electronic test structures highlight the potential advantages for wide applications in chronic biointegrated devices.
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影响因子：
38.3
作者：
通讯作者：
--
DOI：
10.1126/science.1232437
发表时间：
2013-04-12
期刊：
Science (New York, N.Y.)
影响因子：
--
作者：
Kim TI;McCall JG;Jung YH;Huang X;Siuda ER;Li Y;Song J;Song YM;Pao HA;Kim RH;Lu C;Lee SD;Song IS;Shin G;Al-Hasani R;Kim S;Tan MP;Huang Y;Omenetto FG;Rogers JA;Bruchas MR
通讯作者：
Bruchas MR
影响因子：
38.3
作者：
Son, Donghee;Lee, Jongha;Kim, Dae-Hyeong
通讯作者：
Kim, Dae-Hyeong
影响因子：
16.2
作者：
Mayberg, HS;Lozano, AM;Kennedy, SH
通讯作者：
Kennedy, SH
影响因子：
0.5
作者：
Kaur, Navneet;Chou, Tina;Evans, Karleyton C.
通讯作者：
Evans, Karleyton C.