Simulations and Measurement of Electron Energy and Effective Electron Temperature of Nanosecond Pulsed Argon Plasma
Simulations and Measurement of Electron Energy and Effective Electron Temperature of Nanosecond Pulsed Argon Plasma
复制标题
纳秒脉冲氩等离子体电子能量和有效电子温度的模拟与测量
DOI：
10.1088/1009-0630/14/1/10
复制
发表时间：
2012
影响因子：
1.7
通讯作者：
Ding Hongbin
中科院分区：
文献类型：
--
作者：
Wen Xueqing;Xin Yu;Feng Chunlei;Ding Hongbin
The behavior of argon plasma driven by nanosecond pulsed plasma in a low-pressure plasma reactor is investigated using a global model, and the results are compared with the experimental measurements. The time evolution of plasma density and the electron energy probability function are calculated by solving the energy balance and Boltzmann equations. During and shortly after the discharge pulse, the electron energy probability function can be represented by a bi-Maxwellian distribution, indicating two energy groups of electrons. According to the effective electron temperature calculation, we find that there are more high-energy electrons that play an important role in the excitation and ionization processes than low-energy electrons. The effective electron temperature is also measured via optical emission spectroscopy to evaluate the simulation model. In the comparison, the simulation results are found to be in agreement with the measurements. Furthermore, variations of the effective electron temperature are presented versus other discharge parameters, such as pulse width time, pulse rise time and gas pressure.
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影响因子：
1.7
作者：
Du Mu;Zheng Ya-ru;Fan Yu-jia;Zhang Nan;Li Cheng-sen;Wang De-zhen
通讯作者：
Du Mu;Zheng Ya-ru;Fan Yu-jia;Zhang Nan;Li Cheng-sen;Wang De-zhen
影响因子：
1.5
作者：
X. Duten;D. Packan;Lan Yu;C. Laux;C. Kruger
通讯作者：
X. Duten;D. Packan;Lan Yu;C. Laux;C. Kruger
DOI：
10.1016/b978-008044504-5/50007-6
发表时间：
2005
期刊：
--
影响因子：
--
作者：
Cai Changlong;Mi Qian;Ma Weihong;Wu Lingling;Yan Yixin;Diao Dongfeng
通讯作者：
Cai Changlong;Mi Qian;Ma Weihong;Wu Lingling;Yan Yixin;Diao Dongfeng
影响因子：
3.2
作者：
L. Overzet;J. H. Beberman;J. Verdeyen
通讯作者：
L. Overzet;J. H. Beberman;J. Verdeyen
影响因子：
2.9
作者：
J. E. Chilton;J. Boffard;R. S. Schappe;C. Lin
通讯作者：
J. E. Chilton;J. Boffard;R. S. Schappe;C. Lin