Progress on the development of active micro-structured optical arrays for x-ray optics
Progress on the development of active micro-structured optical arrays for x-ray optics
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X射线光学有源微结构光学阵列研制进展
DOI：
10.1117/12.826096
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发表时间：
2009
影响因子：
3.2
通讯作者：
Andy D. Smith
中科院分区：
文献类型：
--
作者：
D. Rodriguez Sanmartin;Dou Zhang;T. Button;C. Atkins;P. Doel;Hongchang Wang;D. Brooks;C. Feldman;R. Willingale;A. Michette;S. Pfauntsch;Shahin Sahraei;M. Shand;A. James;C. Dunare;T. Stevenson;W. Parkes;Andy D. Smith
智能X射线光学(SXO)项目由一个总部位于英国的财团组成，该财团开发有源/自适应微结构光学阵列(MOA)。这些设备被设计成利用掠入射反射通过硅中蚀刻的连续对准的微通道阵列来聚焦X射线。硅沟道是通过干法和湿法蚀刻产生的，后者提供了更光滑的沟道壁。适应性是通过使用压电式致动器来实现的，该致动器可以弯曲设备，从而改变其焦距。我们的目标是获得5厘米的曲率半径，可以使用串联对MOA配置提供合适的焦距。为了优化MOA器件的设计，考虑了不同类型的驱动器(单晶片、双晶片和活性纤维复合材料)以及不同的硅/压电体绝对厚度和相对厚度，对MOA器件进行了有限元模拟。使用粘性塑料加工工艺制造了原型器件，用于压电致动器和干蚀刻硅通道，并使用低收缩粘合剂粘合在一起。已经开发了表征技术，以根据致动器产生的MOA沟道的弯曲来评估器件性能。本文对金属氧化物避雷器的驱动研究进展进行了评价，并将有限元模拟结果与不同原型结构的结果进行了比较。
The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. The silicon channels have been produced both by dry and wet etching, the latter providing smoother channel walls. Adaptability is achieved using piezoelectric actuators, which bend the device and therefore change its focal distance. We aim to achieve a 5 cm radius of curvature which can provide a suitable focal length using a tandem pair MOA configuration. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the MOA device design, consider different types of actuators (unimorph, bimorph and active fibre composites), and different Si/piezoelectric absolute and relative thicknesses. Prototype devices have been manufactured using a Viscous Plastic Processing Process for the piezoelectric actuators and dry etched silicon channels, bonded together using a low shrinkage adhesive. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the actuation of the MOAs, comparing FEA modelling with the results obtained for different prototype structures.
影响因子：
1.7
作者：
Dou Zhang;D. Rodriguez-Sanmartin;T. Button;C. Atkins;D. Brooks;P. Doel;C. Dunare;C. Feldman;A. James;A. Michette;W. Parkes;S. Pfauntsch;Shahin Sahraei;T. Stevenson;Hongchang Wang;R. Willingale
通讯作者：
Dou Zhang;D. Rodriguez-Sanmartin;T. Button;C. Atkins;D. Brooks;P. Doel;C. Dunare;C. Feldman;A. James;A. Michette;W. Parkes;S. Pfauntsch;Shahin Sahraei;T. Stevenson;Hongchang Wang;R. Willingale