A novel approach to fabricate metal oxide nanowire-like networks based coplanar gas sensors array for enhanced selectivity

A novel approach to fabricate metal oxide nanowire-like networks based coplanar gas sensors array for enhanced selectivity
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一种制造基于共面气体传感器阵列的金属氧化物纳米线状网络以增强选择性的新方法

DOI:
10.1016/j.snb.2014.07.076
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发表时间:
2014-12
期刊:
Sensors and Actuators B: Chemical
影响因子:
--
通讯作者:
Changsheng Xie
Changsheng Xie
中科院分区:
其他
文献类型:
--
作者:
Xuelian Peng;Hao Wang;Shunping Zhang;Changsheng Xie

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As inspired by a novel materials-sensor integration fabrication strategy, nanowire-like network (NWN) structured ZnO, Co3O4, In2O3and SnO2films are synthesized directly onto an alumina substrate by the screen printing combined with micro-injecting and calcination (SPMIC) to fabricate a flat-type coplanar gas sensor array based on these four sensors. The gas-sensing properties of the sensor array are investigated at different operating temperatures (150–350 °C), and the best selectivity is interestingly found among the four indoor pollution gases including toluene (C7H8), formaldehyde (HCHO), acetone (CH3COCH3) and ammonia (NH3) at 300 °C. This is also confirmed by the principal component analysis (PCA) result that the four gases can be discriminated and recognized by the sensor array. The enhancement in the selectivity is attributed to the combination of special nanostructures with large surface area and sensor array based on the four different metal oxides. Furthermore, the SPMIC method is demonstrated to be an effective route not only to synthesize NWN structured metal oxides directly onto an alumina substrate without being destroyed, but also to fabricate coplanar sensor array based on various NWN structured metal oxide films.
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