Plasmon-Assisted Zone-Selective Repair of Nanoscale Electrical Breakdown Paths in Metal/Oxide/Metal Structures for Near-Field Optical Sensing
Plasmon-Assisted Zone-Selective Repair of Nanoscale Electrical Breakdown Paths in Metal/Oxide/Metal Structures for Near-Field Optical Sensing
复制标题
用于近场光学传感的金属/氧化物/金属结构中纳米级电击穿路径的等离激元辅助区域选择性修复
DOI：
10.1021/acsanm.8b01257
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发表时间：
2018-07
影响因子：
5.9
通讯作者：
Ang Diing Shenp
中科院分区：
文献类型：
--
作者：
Mohamed Yousef Hassan;Zhou Yu;GU Chenjie;Liu Hailong;Yang Joel Kwang;Ang Diing Shenp
我们报告的选择性修复纳米氧化物击穿路径，局部表面等离子体效应，在夹层氧化物层的金属/氧化物/金属结构。测试装置具有铝/SiO2叠层，其在表面氧化的平面底部铝电极（即，Al/SiO2/AlOx/Al），并且可以支持可见光谱中的等离子体共振模式。通过导电原子力显微镜的顶部Al电极的二维轮廓，以获得纳米盘堆叠内的电流分布，揭示了在电应力事件之后的SiO2/AlOx层中的多个击穿路径。白光照射后的电流的重新分布显示优先修复的击穿路径内的特定的“区”中的纳米盘和相应的平均漏电流的减少。位于纳米盘的顶部和底部区域附近的击穿路径被消除，留下纳米盘的中心部分中的击穿路径。由此产生的postillumination泄漏电流地图的纳米盘同意非常好的二维光场增强图案使用有限差分时域方法计算，表明区域选择性修复源于增强光场所产生的局部表面等离子体效应在顶部和底部区域的纳米盘。我们的研究结果点的前景，实现电可读的纳米级金属/氧化物/金属近场光学传感器的基础上的光触发恢复氧化物击穿。
We report the selective repair of nanoscale oxide breakdown paths, by the localized surface plasmon effect, in the sandwiched oxide layer of a metal/oxide/metal structure. The test device has an aluminum/SiO2 stack, patterned in the form of a nanodisc (of diameter ∼100 nm) over a surface-oxidized, planar bottom aluminum electrode (i.e., Al/SiO2/AlOx/Al) and can support plasmonic resonance modes in the visible spectrum. Two-dimensional profiling of the top Al electrode by conductive atomic force microscopy, to obtain the distribution of the current within the nanodisc stack, reveals multiple breakdown paths in the SiO2/AlOx layers following an electrical stressing event. Reprofiling of the current after white-light illumination shows preferential repair of the breakdown paths within specific “zones” in the nanodisc and a corresponding decrease of the average leakage current. Breakdown paths situated near the top and bottom regions of the nanodisc are eliminated, leaving behind breakdown paths in the central part of the nanodisc. The resultant postillumination leakage current map of the nanodisc agrees very well with the two-dimensional optical-field enhancement pattern calculated using the finite-difference time-domain method, indicating that the zone-selective repair stems from enhanced optical fields arising from the localized surface plasmon effect in the top and bottom regions of the nanodisc. The findings of our study point to the prospect of realizing an electrically readable nanoscale metal/oxide/metal near-field optical sensor based on the light-triggered restoration of oxide breakdown.
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影响因子：
4
作者：
M. Liang;J. Choi
通讯作者：
M. Liang;J. Choi
影响因子：
7
作者：
A. Wan;Tao Wang;Tingting Yin;Anran Li;Hailong Hu;Shuzhou Li;Zexiang Shen;C. Nijhuis
通讯作者：
A. Wan;Tao Wang;Tingting Yin;Anran Li;Hailong Hu;Shuzhou Li;Zexiang Shen;C. Nijhuis
影响因子：
10.8
作者：
Y. Ho;Li-Chung Huang;J. Delaunay
通讯作者：
Y. Ho;Li-Chung Huang;J. Delaunay
影响因子：
16.6
作者：
通讯作者：
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DOI：
10.1021/acs.jpclett.6b00579
发表时间：
2016-06
期刊：
The journal of physical chemistry letters
影响因子：
--
作者：
K. Miyano;M. Yanagida;Neeti Tripathi;Y. Shirai
通讯作者：
K. Miyano;M. Yanagida;Neeti Tripathi;Y. Shirai