Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling
Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling
复制标题
开发双极静电吸盘，其具有兼容的光束阵列组件，具有四个 3D 打印层，用于大型薄膜处理
DOI：
10.1088/2631-8695/ac4a49
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发表时间：
2022
影响因子：
1.7
通讯作者：
Saito Shigeki
中科院分区：
文献类型：
--
作者：
Taoka Yuki;Hayashi Terumichi;Hemthavy Pasomphone;Takahashi Kunio;Saito Shigeki
本研究提出并验证了双极静电夹持器堆叠由弹性可变形双极梁阵列组成的3d打印分层模块。通过比较具有高机械顺应性和低机械顺应性的两类模块，阐明了夹持器机械顺应性对其产生的吸引力的影响。实验测量了夹持器的吸引力，并演示了薄膜的拾取性能。结果表明，力学柔度对减轻叠层构件的吸引力下降起着重要作用。通过观察所提出的双极静电夹持器的拾取和放置行为，证明了夹持器的薄膜处理能力。
This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams. The influence of the mechanical compliance of grippers on the attractive force that it generates is clarified by comparing two types of modules having either high or low mechanical compliances. Experiments measured the attractive force of the gripper and demonstrated the pick-and-place performance of a thin film. The results show that mechanical compliance plays an important role in mitigating the attractive force decrease in stacking modules. The grippers' ability for thin film handling is demonstrated by observing pick-and-place behaviours of the proposed bipolar electrostatic grippers.
影响因子：
12.6
作者：
Kudo, Hiroyuki;Sawada, Takanori;Mitsubayashi, Kohji
通讯作者：
Mitsubayashi, Kohji