Dual-MWCNT Probe Thermal Sensor Assembly and Evaluation Based on Nanorobotic Manipulation inside a Field-Emission-Scanning Electron Microscope
Dual-MWCNT Probe Thermal Sensor Assembly and Evaluation Based on Nanorobotic Manipulation inside a Field-Emission-Scanning Electron Microscope
复制标题
基于场发射扫描电子显微镜内纳米机器人操作的双 MWCNT 探针热传感器组装和评估
DOI：
10.5772/59932
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发表时间：
2015-03
影响因子：
2.3
通讯作者：
Fukuda Toshio
中科院分区：
文献类型：
--
作者：
Yang Zhan;Wang Pengbo;Shen Yajing;Chen Tao;Chen Liguo;Huang Qiang;Sun Lining;Fukuda Toshio
我们报道了一种由两个多壁碳纳米管(MWCNTs)组成的场发射扫描电子显微镜热敏传感器。传感器是使用纳米机器人操作系统组装的，该系统用于构建探头尖端，以检测单个细胞的局部环境。采用原子力显微镜(AFM)悬臂梁作为衬底，悬臂梁由Si3N4组成，两侧覆盖一层金层。利用纳米机器人技术将多壁碳纳米管分别组装在原子力显微镜悬臂梁的两侧。随后，另一个原子力显微镜悬臂被用作末端执行器，以操纵多壁碳纳米管相互接触。然后使用电子束诱导沉积(EBid)将两个多壁碳纳米管连接在一起。在25°C到60°C的温度范围内，对MWCNT探针式热敏传感器在恒温容器中进行了测试，实验结果表明该传感器的温度电阻系数(TCR)具有正特性。
We report a thermal sensor composed of two multiwalled carbon nano-tubes (MWCNTs) inside a field-emission-scanning electron microscope. The sensor was assembled using a nanorobotic manipulation system, which was used to construct a probe tip in order to detect the local environment of a single cell. An atomic force microscopy (AFM) cantilever was used as a substrate; the cantilever was composed of Si3N4 and both sides were covered with a gold layer. MWCNTs were individually assembled on both sides of the AFM cantilever by employing nanorobotic manipulation. Another AFM cantilever was subsequently used as an end effector to manipulate the MWCNTs to touch each other. Electron-beam-induced deposition (EBID) was then used to bond the two MWCNTs. The MWCNT probe thermal sensor was evaluated inside a thermostated container in the temperature range from 25°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR).
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影响因子：
1.7
作者：
E. Walter;R. Penner;H. Liu;K. Ng;M. Zach;F. Favier
通讯作者：
E. Walter;R. Penner;H. Liu;K. Ng;M. Zach;F. Favier
影响因子：
64.8
作者：
IIJIMA, S
通讯作者：
IIJIMA, S
影响因子：
2.4
作者：
Kuo, Cheng Yung;Chan, Chia Lang;Ting, Jyh-Hua
通讯作者：
Ting, Jyh-Hua
影响因子：
17.4
作者：
Lee, Jaebeom;Kotov, Nicholas A.
通讯作者：
Kotov, Nicholas A.
影响因子：
10.8
作者：
Jensen, K.;Weldon, J.;Zettl, A.
通讯作者：
Zettl, A.