Towards a Particle Based Simulation of Complex Plasma Driven Nanocomposite Formation

Towards a Particle Based Simulation of Complex Plasma Driven Nanocomposite Formation
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复杂等离子体驱动纳米复合材料形成的基于粒子的模拟

DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
H. Kersten
H. Kersten
中科院分区:
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文献类型:
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作者:
M. Bonitz;L. Rosenthal;K. Fujioka;V. Zaporojtchenko;F. Faupel;H. Kersten

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概述了磁控管等离子体中纳米复合材料形成的基于粒子的模拟。在讨论了金属簇生长和扩散的最新动力学蒙特卡罗结果之后,提出了金属和聚合物共溅射模拟的新结果。然后,讨论了基于分子动力学的第二种方法,并显示了等离子体中两个团簇聚结的时间分辨结果。最后,我们对等离子体中团簇生长与表面沉积阶段耦合的集成模拟的前景进行了展望(© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA,Weinheim)
An overview on particle‐based simulation of nanocomposite formation in a magnetron plasma is given. After discussing recent kinetic Monte Carlo results for metal cluster growth and diffusion, new results for the simulation of co‐sputtering of metal and polymer are presented. Then, the second method based on molecular dynamics is discussed and time‐resolved results for the coalescence of two clusters in the plasma are shown. We conclude with an outlook on the prospects for an integrated simulation of cluster growth in the plasma coupled to the surface deposition phase (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
复杂等离子体的最新进展
DOI: 10.1002/ctpp.201200076
发表时间: 2012
影响因子: 1.6
作者:
M. Bonitz;J. Meichsner (guest eds.)
通讯作者: J. Meichsner (guest eds.)