Relationships between Raman parameters obtained from cyclic indentation impressions on DLC coatings
Relationships between Raman parameters obtained from cyclic indentation impressions on DLC coatings
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从 DLC 涂层上的循环压痕压痕获得的拉曼参数之间的关系
DOI：
10.1002/sia.6780
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发表时间：
2020
影响因子：
1.7
通讯作者：
Kobata Junpei
中科院分区：
文献类型：
--
作者：
Takagawa Yuka;Nakamura Morimasa;Miura Ken‐ichi;Kobata Junpei
使用直径为10 mm的Si 3 N4球在约107 N的法向载荷下循环压痕类金刚石碳（DLC）涂层3000至15000次。DLC涂层是通过非平衡磁控（UBM）溅射在衬底偏压为-200下在热处理和抛光的JIS SCM 415衬底上制备的。压痕的SEM图像和能量色散X射线光谱（EDX）结果表明，压痕上部分显示出Cr/C层或基材表面。为了评估循环压痕后DLC涂层的结构变化，对压痕进行了拉曼光谱分析。利用压痕的拉曼光谱，估计了1350 cm-1附近的无序峰和1580 cm-1附近的石墨峰的强度比I（D）/I（G）等拉曼参数与G峰的半峰全宽（FWHM（G））之间的关系。本文定义了由I（D）/I（G）和半高宽（G）的最大值和最小值所包围的区域为“安全区”，并以此来判断DLC膜的完整性。
Diamond‐like carbon (DLC) coatings were indented 3000 to 15 000 times cyclically using a Si3N4sphere having a diameter of 10 mm under a normal load of approximately 107 N. DLC coatings were prepared by unbalanced magnetron (UBM) sputtering under substrate bias voltage of −200 on a heat‐treated and polished JIS SCM 415 substrates. SEM images and the energy dispersive X‐ray spectrometry (EDX) results of the indented impressions showed that a Cr/C layer or substrate surface partially revealed on the impressions. In order to estimate structural alterations in DLC coatings after cyclic indentations, Raman spectroscopy were performed on the impressions. Relationships between Raman parameters such as the intensity ratioI(D)/I(G) of the disorder peak around 1350 cm−1and the graphitic peak around 1580 cm−1and full width of half maximum of the G peak (FWHM(G)) were estimated with the Raman spectroscopy on the impressions. Enclosed area by maximum and minimum ofI(D)/I(G) andFWHM(G) was defined as “Safety Zone” in this paper, and it can be used to determine integrity of DLC coatings.
循环球压痕引起的DLC薄膜失效及薄膜结构对失效模式的影响
DOI：
10.9773/sosei.60.203
发表时间：
2019
期刊：
Journal of the Japan Society for Technology of Plasticity
影响因子：
--
作者：
M. Nakamura;Yuka Takagawa;Ryuki Yamazoe;Ken;Jyunpei Kobata
通讯作者：
Jyunpei Kobata