Development of THGEM-like detectors with diamond-like carbon resistive electrodes

Development of THGEM-like detectors with diamond-like carbon resistive electrodes
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开发具有类金刚石碳电阻电极的类 THGEM 探测器

DOI:
10.1088/1748-0221/15/11/p11013
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发表时间:
2020-11
影响因子:
1.3
通讯作者:
邵明
邵明
中科院分区:
工程技术4区
文献类型:
--
作者:
宋国锋;周意;邵明

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我们开发了含有类金刚石碳 (DLC) 的电阻 THGEM (RTGEM) 薄膜,这是一种具有可调电阻率的坚固电阻材料。 RTGEM 薄膜是通过磁控溅射在 PCB 上涂覆 DLC 层,然后机械钻孔来制造的。成功制作了不同配置的RTGEM探测器原型,敏感面积范围从5×5 cm2到20×100 cm2。为了实现更高的增益,通过电阻 DLC 层将单面 RTGEM 耦合到阳极 PCB,引入了电阻井 (RWELL) 探测器。与传统的金属电极 THGEM 相比,RTGEM 制造工艺更加简单、高效,适合大规模生产。电阻材料可以限制高气体增益时发生的放电能量,使探测器更加坚固。单级 RTGEM 探测器实现了 >103 的增益,并表现出良好的长期增益稳定性。大面积 RTGEM 探测器(有效面积:20 × 100 cm2)具有良好的增益均匀性(∼12%)。 RWELL 探测器实现了 >8 × 103 的增益。本文介绍了详细的制造工艺和性能研究结果。
We developed resistive THGEM (RTGEM) films with diamond-like carbon (DLC), a robust resistive material with adjustable resistivity. The RTGEM films were manufactured by coating DLC layers on PCB via magnetron sputtering and then mechanically drilling holes. RTGEM detector prototypes with different configurations with sensitive area ranging from 5 × 5 cm2 to 20 × 100 cm2 were successfully fabricated. To achieve higher gain, resistive well (RWELL) detectors were introduced by coupling single-faced RTGEM to anode PCB via resistive DLC layers. The RTGEM manufacturing process is simpler and efficient compared with the conventional THGEM with metallic electrodes, making it suitable for large-scale production. The resistive material can limit the energy of discharges occurring at high gas gains, making the detectors more robust. The single-stage RTGEM detectors achieved gains >103 and demonstrated good long-term gain stability. A large-area RTGEM detector (active area: 20 × 100 cm2) had good gain uniformity (∼12%). RWELL detectors achieved gains >8 × 103. Detailed fabrication process and performance study results are presented in this article.
具有类金刚石碳电阻电极和二维读数的μRWELL探测器的制造和性能
DOI: 10.1016/j.nima.2019.01.036
发表时间: 2019-05
期刊: Nuclear Inst. and Methods in Physics Research, A
影响因子: --
作者:
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通讯作者: Zhiyong Zhang
具有 DLC 涂层的充电“Free”THGEM 的生产和性能
DOI: 10.1016/j.nima.2020.163868
发表时间: 2020-06
期刊: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
影响因子: --
作者:
宋国锋;邵明
通讯作者: 邵明
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