Formation of multilayer structure and evolution of shape recovery characteristics in proton irradiated TiNi alloy thin films
Formation of multilayer structure and evolution of shape recovery characteristics in proton irradiated TiNi alloy thin films
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质子辐照 TiNi 合金薄膜多层结构的形成及形状恢复特性的演变
DOI：
10.1016/j.matchar.2020.110348
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发表时间：
2020-06
影响因子：
4.7
通讯作者：
Cai Wei
中科院分区：
文献类型：
--
作者：
Zhao Yundong;Ning Rui;Yi Xiaoyang;Gao Zhiyong;Wang Haizhen;Cai Wei
TiNi薄膜作为航空航天器微机电系统（MEMS）的驱动器材料受到了广泛的关注。然而，多次辐照，如质子辐照，通常被认为是航空航天材料的一个重要失效因素。研究了质子辐照后TiNi薄膜的微观结构、马氏体相变和形状恢复特性。用掠入射X射线衍射（GI XRD）和透射电镜（TEM）相结合的方法，研究了质子辐照后由单层结构的B19'相转变为多层结构的双相（B2和B19'）。辐照后的薄膜具有非晶层和B2奥氏体相，在辐照层和未辐照层中均发生两步马氏体相变。相比之下，未辐照的对应物仅表现出单步马氏体相变。另外，TiNi薄膜经辐照后，还出现了一些缺陷。这种缺陷可以诱导在B2相中产生R相的应力场。120 keV质子辐照后，优先溅射效应和逆Kirkendall效应的协同作用在辐照层中产生了GP区。非晶相和析出相的存在严重影响了复合材料的形状回复性能。
TiNi thin films have attracted wide attentions as actuator materials in the micro-electro-mechanical systems (MEMs) for aerospace craft. However, multiple irradiation, such as the proton, was generally considered as an essential expired factor for the materials used in the aerospace. The present paper focused on the microstructure, martensitic transformation and shape recovery property of TiNi thin films after being irradiated by proton. A single layer structure B19' phase to a dual-phase (B2 and B19') with multilayer structure after proton irradiation have been revealed through a combination technique of grazing incidence (GI) XRD and TEM. As-formed irradiated films with amorphous layer and B2 austenite phase displayed a two-step martensitic transformation behavior, which occurred in the irradiated and the unirradiated layer. In contrast, the unirradiated counterparts just exhibited a single-step martensitic transformation. In addition, some defects could be seen after the TiNi films being irradiated. Such defects could induce a stress field that produces the R phase in the B2 phase. Furthermore, the synergistic effect of preferential sputtering effect and inverse Kirkendall effect induced the GP zones in the irradiated layer after 120 keV proton irradiation. The existence of amorphous phase and precipitation significantly deteriorated the shape recovery property.
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DOI：
10.1016/0001-6160(89)90072-2
发表时间：
1989-07-01
期刊：
ACTA METALLURGICA
影响因子：
--
作者：
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通讯作者：
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影响因子：
9.4
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影响因子：
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影响因子：
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通讯作者：
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发表时间：
2003-10
影响因子：
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