Micro Fabricated MEMS Colorimetric Devices to Measure Zika-Induced Residual Stress and Mass Loading
Micro Fabricated MEMS Colorimetric Devices to Measure Zika-Induced Residual Stress and Mass Loading
复制标题
用于测量 Zika 引起的残余应力和质量负载的微型 MEMS 比色设备
作者：
S. Dolai;B. Baker;M. Tabib
使用带有金盘和三角形的微加工氮化硅悬臂梁来研究和量化通过与 Zika 适体的硫醇端基结合然后与 Zika 结合而产生的残余应力。与适体和 Zika 的结合产生了约 53 MPa 的大残余拉伸应力，使光束偏转并改变了它们的反射颜色。它还导致三角形金色贴片从氮化物基板上分离，从而影响基板的“金色”颜色。氮化物梁振动的动态测量用于测量 Zika 的质量负载，灵敏度为 2 kHz/ng。由于与 Zika 结合而产生的残余应力超过 <inline-formula> <tex-math notation="LaTeX">$9 imes 10 ^{mathbf {4}}$ </tex-math></inline-formula> Zika/beam 导致氮化物梁弯曲。使用三角形贴片测得寨卡病毒引起的残余应力为 96 MPa。然后使用大型醋酸纤维素梁观察20 nm金层（0.24 MPa）、适体（0.3 MPa）和Zika（0.5 MPa）引起的残余应力。醋酸盐梁位移用于“感知”寨卡，灵敏度 <inline-formula> <tex-math notation="LaTeX">$2 imes 10 ^{mathbf {-6}},,mu ext{m}$ </tex-math></inline-formula>/Zika 灵敏度。
Microfabricated silicon nitride cantilever beams, with gold disks and triangles were used to study and quantify residual stresses generated by binding with the thiol end groups of Zika aptamers and then with Zika. Binding with aptamers and Zika generated large tensile residual stresses ~ 53 MPa that deflected the beams and changed their reflective color. It also caused the triangular gold patches to detach from their nitride substrates affecting the substrates’ “golden” color. Dynamic measurements of the nitride beams’ vibrations were used to measure mass loading by Zika with the sensitivity of 2 kHz/ng. The residual stress built-up due to binding with Zika in excess of <inline-formula> <tex-math notation="LaTeX">$9 imes 10 ^{mathbf {4}}$ </tex-math></inline-formula> Zika/beam caused nitride beams to buckle. Zika-induced residual stress measured using the triangular patches was 96 MPa. Large-scale cellulose acetate beams were then used to observe the residual stresses caused by 20 nm gold layer (0.24 MPa), aptamers (0.3 MPa), and then with Zika (0.5 MPa). Acetate beam displacement was used to “sense” Zika with <inline-formula> <tex-math notation="LaTeX">$2 imes 10 ^{mathbf {-6}},,mu ext{m}$ </tex-math></inline-formula>/Zika sensitivity.
影响因子：
56.9
作者：
JENISON, RD;GILL, SC;POLISKY, B
通讯作者：
POLISKY, B