Mechanical Property Evaluation of Micro Cantilever Fabricated Using Micro-stereolithography
Mechanical Property Evaluation of Micro Cantilever Fabricated Using Micro-stereolithography
复制标题
使用微立体光刻技术制造的微悬臂梁的机械性能评估
DOI：
10.1541/ieejsmas.127.102
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发表时间：
2007
影响因子：
--
通讯作者：
Y. Koshimoto
中科院分区：
文献类型：
--
作者：
M. Miwa;H. Kawaguchi;Kazuchika Douoka;S. Yoneyama;Shigeki Tuchitani;Y. Koshimoto
研究了微光固化微悬臂梁的弹性模量与激光功率的关系。通过改变μSL系统的辐照激光功率和后固化处理时间来形成样品。研制了一种测量微悬臂梁挠度和载荷的装置。然后，由实测的荷载-挠度关系的斜率和材料强度的计算公式，计算出试件的弹性模量。结果表明，μSL微悬臂梁的弹性模量与辐照激光功率有关。也就是说，微结构的机械性能可以通过照射激光功率和后固化工艺来控制。
Dependence of elastic modulus of micro cantilever fabricated by micro-stereolithography (μSL) on irradiation laser power is investigated in this study. The samples are formed by changing the irradiation laser power of μSL system and postcure processing time. A device for measuring deflection of the micro cantilever and applied load is developed. Then, the elastic moduli of the samples are evaluated from the gradient of the measured load-deflection relation and the formula of the strength of materials. Results show that the elastic modulus of the micro cantilever made by μSL is depend on the irradiation laser power. That is, the mechanical property of micro structures can be controlled by the irradiation laser power and post cure process.
影响因子：
3.5
作者：
Juodkazis, S;Mizeikis, V;Misawa, H
通讯作者：
Misawa, H