Nanolaminated Oxide Ceramic Coatings in the Y2O3‐Al2O3 System

Nanolaminated Oxide Ceramic Coatings in the Y2O3‐Al2O3 System
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Y2O3âAl2O3 体系中的纳米层状氧化物陶瓷涂层

DOI:
10.1002/9780470909836.ch23
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发表时间:
2010
期刊:
影响因子:
--
通讯作者:
H. Keune
H. Keune
中科院分区:
--
文献类型:
--
作者:
N. K. Eils;P. Mechnich;M. Schmücker;H. Keune

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采用螺旋送料系统,用MOCVD方法制备了Y_2O_3-Al_2O_3系氧化物陶瓷涂层。纯Al 2 O3涂层以及含有Al 2 O3和Y2 O3的涂层显示出纳米层压的微观结构,而纯Y2 O3涂层显示出羽毛状的微观结构。进一步的实验与修改的沉积参数进行,以控制laminate特性。因此,系统地改变起始材料的化学计量、前体进料速率和衬底温度。当涂层沉积在一个较低的基板温度或使用一个富铝的起始材料和高前体进料速率,分别发现高度独特的laminates。对纳米层结构基线涂层进行了空气和流动水蒸气中的退火实验,以研究微观结构的发展。观察到纳米孔向较大孔的聚结,同时保持层状涂层形态。
Oxide ceramic coatings in the Y2O3-Al2O3 system were deposited by MOCVD using a screw feeding system. The pure Al2O3-coatings as well as the coatings containing Al2O3 and Y2O3 show a nanolaminated microstructure whereas pure Y₂O3-coatings reveal a feathery microstructure. Further experiments with modified deposition parameters were carried out in order to control the lamellae characteristics. Therefore the stoichiometry of the starting material, the precursor feeding rate and the substrate temperature were varied systematically. Highly distinctive lamellae were found when the coating was deposited at a low substrate temperature or using an aluminum-rich starting material and a high precursor feeding rate, respectively. Annealing experiments in air and flowing water vapor of the nanolamellar structured baseline coating were carried out in order to investigate the microstructural development. Coalescence of nanopores to larger pores was observed while the lamellar coating morphology maintains.
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发表时间: 2008-03
期刊: --
影响因子: --
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