Characteristics of hydrogen plasma treatment on Al2O3/CrxOy/AlmOn composite film via Al-ion-implantation and ultra-low partial pressure oxidation
Characteristics of hydrogen plasma treatment on Al2O3/CrxOy/AlmOn composite film via Al-ion-implantation and ultra-low partial pressure oxidation
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Al离子注入超低分压氧化氢等离子体处理Al2O3/CrxOy/AlmOn复合薄膜的特性
DOI：
10.1016/j.surfcoat.2020.125917
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发表时间：
2020-08
影响因子：
5.4
通讯作者：
Zhang Zhengjun
中科院分区：
文献类型：
--
作者：
Zhou Qingyun;Ling Yunhan;Lu Zhaoxia;Luo Yan;Wang Jipeng;Zhang Zhengjun
本文研究了Al_2O_3/CrxOy/AlmON复合膜的制备及其在氢等离子体环境中的稳定性。将Al离子注入到纯铬衬底表面，以在超低氧分压条件下形成的Cr2O3为晶核模板，有望诱导氧化铝转变为α-Al2O3。这是为了提高薄膜的氢阻性能。用扫描电子显微镜(SEM)、原子力显微镜(AFM)研究了3种不同注入剂量(2×10~(17)ion/cm~2、3.5×10~(17)ion/cm~2和5×10~(17)ion/cm~2)薄膜的表面形貌演变和相组成，并用透射电子显微镜(TEM)分析了薄膜的横截面结构。用电化学方法评价了薄膜在氢等离子体环境中的稳定性。实验结果表明，复合涂层由Al_2O_3/CrxO_y/Al_2O_3三层结构组成。Al_2O_3层主要由γ-Al_2O_3和少量α-Al_2O_3组成。CrxOy和AlmOn层为部分金属铬或铝，并含有少量相应的氧化物。复合涂层经氢处理后表现出较高的稳定性。电化学测试表明，复合膜具有良好的抗氢渗透性能。本研究为氢渗透阻挡层的潜在应用提供了一种新的涂层。
In this paper, the preparation of Al2O3/CrxOy/AlmOncomposite film and the stability of the composite film in a hydrogen plasma environment are studied. Al ions were implanted into the surface of pure chromium substrate, which was expected to induce the transformation of alumina into α-Al2O3by using Cr2O3formed under ultra-low oxygen partial pressure conditions as a template for crystal nucleation. This was to improve the hydrogen barrier properties of the film. The surface morphology evolution and phase composition of three different implanted doses (2 × 1017ion/cm2, 3.5 × 1017ion/cm2, and 5 × 1017ion/cm2) were studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), and the cross-sectional structure of the film was analyzed by transmission electron microscopy (TEM). The stability of the film in a hydrogen plasma environment was evaluated by electrochemical methods. The experimental results show that the composite coating is composed of a three-layer structure of Al2O3/CrxOy/AlmOn. The Al2O3layer is mainly composed of γ-Al2O3and a small amount of α-Al2O3. The CrxOyand AlmOnlayers are partial metallic Cr or Al, and they contain a small amount of corresponding oxides. The composite coating shows high stability after hydrogen treatment. Electrochemical tests show that the composite film has good hydrogen permeation resistance. This research provides a new coating for potential hydrogen permeation barrier application.
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