Precision measurement of ablation thresholds with variable pulse duration laser
Precision measurement of ablation thresholds with variable pulse duration laser
复制标题
使用可变脉冲持续时间激光精确测量烧蚀阈值
DOI：
10.1007/s00339-020-03754-5
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Y. Kobayashi
中科院分区：
文献类型：
--
作者：
Takashi Takahashi;S. Tani;R. Kuroda;Y. Kobayashi
激光消融阈值对脉冲宽度的依赖关系是有助于理解激光消融机理的有力工具。为了准确地确定消融阈值的期望值，必须增加可用于分析的数据点的数量。在这项研究中，我们开发了一种自动脉冲宽度可调激光加工系统，该系统带有现场监视器，可以在几个小时内收集超过10,000个数据点。激光系统波长为1050 nm，重复频率为1 MHz，脉冲宽度可调至0.53~31ps。多次发射(105\Docentclass[12pt]{Minimum}\usepackage{amsath}\usepackage{wa ysym}\usepackage{amsFonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{matrsfs}\usepackage{upgreek}\setlong{\oddsidemargin}{-69pt}\Begin{Document}${10}^5$$\end{Document}脉冲)对硅的烧蚀阈值进行了测量，平均误差小于1%。我们发现有两个消融阈值，流量为0.22J/cm2\DocumentClass[12pt]{Minimum}\usepackage{amsath}\usepackage{wa ysym}\usepackage{amsfonts}\usepackage{amssymb}\usepackage{amsbsy}\usepackage{mathsfs}\usepackage{upgreek}\setlong{\oddsidemargin}{-69pt}\Begin{Document}$0.22\\Hbox{J}/\Hbox{cm}^2$\end{Document}，脉冲持续时间低于4 ps，强度为24GW/cm2\DocumentClass[12pt]{Minimum}\usepackage{amsath}\usepackage{wa ysym}\usepackage{amsfonts}\usepackage{amsbsy}\usepackage{mathsfs}\usepackage{upgreek}\setlong{\oddsidemargin}{-69pt}\Begin{Document}$24\Hbox{Gw}/\Hbox{cm}^2$$\end{Document}，脉冲持续时间超过13 ps。
The laser ablation threshold’s dependence on the pulse duration is a powerful tool that can be used to aid in understanding the mechanism of laser ablation. To determine the expected value of the ablation threshold accurately, it is essential to increase the number of data points available for analysis. In this study, we developed an automatic pulse-duration-tunable laser processing system with an in situ monitor that can collect more than 10,000 data points in a few hours. The laser system was operated at a wavelength of 1050 nm with a repetition rate of 1 MHz, and the pulse duration was tuned from 0.53 to 31 ps. Multi-shot (105\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${10}^5$$\end{document} pulses) ablation thresholds for silicon were measured with an average error of less than 1%. We found that there were two ablation thresholds, at a fluence of 0.22J/cm2\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$0.22\ \hbox {J}/\hbox {cm}^2$$\end{document} with a pulse duration below 4 ps and at an intensity of 24GW/cm2\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$24\ \hbox {GW}/\hbox {cm}^2$$\end{document} of intensity with a pulse duration above 13 ps.
影响因子：
3.2
作者：
Raemer, A.;Osmani, O.;Rethfeld, B.
通讯作者：
Rethfeld, B.