Determination of the full scattering matrix using coherent Fourier scatterometry.
Determination of the full scattering matrix using coherent Fourier scatterometry.
复制标题
使用相干傅里叶散射测量法确定全散射矩阵。
作者：
Nitish Kumar;L. Cisotto;Sarathi Roy;Gopika K. P. Ramanandan;S. Pereira;H. Paul Urbach
我们演示了一种方法，通过使用聚焦光束相干傅里叶散射测量获得任意数值孔径（NA）内的散射体的整个散射矩阵。在光学系统的NA内的所有散射角的远场强度在一次拍摄中获得。通过干涉配置获得场的相应相位。该方法使得能够从包含在系统的给定NA中的散射远场数据中检索关于散射体的最大可用信息。
We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration. This method enables the retrieval of the maximum available information about the scatterer from scattered far-field data contained in the given NA of the system.
影响因子：
19.4
作者：
Paz, Valeriano Ferreras;Peterhaensel, Sandy;Osten, Wolfgang
通讯作者：
Osten, Wolfgang