Droplet-induced abnormal bending of micro-beams

Droplet-induced abnormal bending of micro-beams
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液滴引起的微梁异常弯曲

DOI:
10.1080/01694243.2012.742400
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发表时间:
2013-05
影响因子:
2.3
通讯作者:
Wu, R. N.
Wu, R. N.
中科院分区:
材料科学3区
文献类型:
--
作者:
Liu, J. L.;Xia, R.;Mei, Y.;Wu, R. N.

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本文对微梁上/下表面液滴引起的异常变形进行了理论研究。在考虑液滴表面张力和拉普拉斯压差的情况下,推导了微梁的弯矩和挠度。挠度曲线表明,液滴附着在悬臂梁上表面时,悬臂梁不可避免地会向上倾斜;液滴附着在简支梁和固支梁的下表面时,梁的大部分部位会向上弯曲。这些异常变形行为已被我们的有限元模拟所证实。我们还演示了在液滴参数变化的过程中,边界条件对微梁偏转曲线的影响程度。了解梁的这种异常弯曲机理,对于微机电系统(MEMS)和微纳测量等工业应用具有重要意义,可以为设计更高精度的微传感器提供启示。
We present a theoretical study of the abnormal deformation of micro-beams induced by a droplet placed on their top/bottom surfaces. The bending moments and deflections of the micro-beams are derived in consideration of the surface tension and Laplacian pressure difference of the droplet. The deflection curves show that the cantilever inevitably tilts upwards with a droplet on its top surface, and most parts of the simply supported beam and clamped–clamped beam will bend upwards when a droplet is adhered to their bottom surfaces. These anomalous deformation behaviors have been verified by our finite element simulations. We also demonstrate what extent of the boundary conditions will affect the deflection curves of the micro-beams during the variation of the droplet’s parameters. Understanding this abnormal bending mechanism of the beams can be beneficial to some industry applications, such as the micro-electro-mechanical systems (MEMS) and the micro/nano-measurement, which can provide the inspiration of engineering more precision micro-sensors.
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