A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement.
A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement.
复制标题
用于微尺度爆震压力测量的锰铜薄膜超高压传感器
DOI：
10.3390/s18030736
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发表时间：
2018-03-01
期刊：
影响因子：
--
通讯作者：
Zhao Y
中科院分区：
文献类型：
--
作者：
Zhang G;Zhao Y;Zhao Y;Wang X;Wei X;Ren W;Li H;Zhao Y
随着含能材料（EM）和微机电系统（MEMS）火工品的发展，在微尺度上测量EM产生的爆压成为迫切需要。为了测量微雷管输出压力，研制了一种基于MEMS技术的锰铜薄膜超高压压力传感器。为更好地设计传感器的敏感元件，提出了一个可靠系数。该传感器采用三明治结构：基板采用0.5mm厚的氧化铝陶瓷，基板上依次溅射0.2mm × 0.1mm × 2 μm的锰铜敏感元件和2 μm厚的铜电极，敏感元件上包裹25 μm厚的聚酰亚胺绝缘层。静态测试表明，锰铜薄膜的压阻系数为0.0125 GPa−1。动态实验表明，微雷管的爆压为12.66GPa，传感器的响应时间为37ns。总之，本研究所研制的传感器适用于微尺度的超高压测量，并且比箔式锰铜压力计具有更短的响应时间。同时，该研究也为超高压传感器的小型化研究提供了有益的参考。
With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor’s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm × 0.1 mm × 2 μm and copper electrodes of 2 μm thick are sputtered sequentially on the substrate, and a 25 μm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa−1. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.
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影响因子：
3.2
作者：
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