Interlayer Polarization Beam Splitter Based on Asymmetrical Si Wire Directional Coupler

Interlayer Polarization Beam Splitter Based on Asymmetrical Si Wire Directional Coupler
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基于非对称硅线定向耦合器的层间偏振分束器

DOI:
10.1109/lpt.2016.2558286
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发表时间:
2016
影响因子:
2.6
通讯作者:
Masahiko Mori
Masahiko Mori
中科院分区:
工程技术3区
文献类型:
--
作者:
Yuki Atsumi;Ryohei Takei;Makoto Okano;Tomohiro Amemiya;Youichi Sakakibara;Masahiko Mori

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提出并设计了一种基于单晶硅和氢化非晶硅(a-Si:H)垂直非对称定向耦合器的紧凑型硅层间偏振分束器(PBS)。通过改变a-Si:H上波导的厚度,可以用结构简单的平行硅线波导实现TM模耦合的PBS。该器件具有260 nm×220 nm的第一层波导和340 nm×200 nm的第二层波导,工作在77 nm的宽带带宽内,C波段的串扰小于-20分贝,插入损耗为0.3分贝。该装置在两个波导之间的对准误差方面是稳健的。
We proposed and designed a compact Si interlayer polarization beam splitter (PBS) that is based on a crystalline Si and hydrogenated amorphous Si (a-Si:H) vertical asymmetrical directional coupler toward 3-D Si photonics integrated circuits. The changeable thickness of the upper a-Si:H waveguide enables the realization of the TM-mode-coupled PBS with simple-structured parallel Si wire waveguides. The device with a 260-nm × 220-nm first-layer waveguide and a 340-nm × 200-nm second-layer waveguide operates in a broadband width of 77 nm, with a crosstalk of less than -20 dB and an insertion loss of <;0.3 dB in the C-band. The device is robust in terms of alignment error between the two waveguides.
用于密集高折射率对比度电路的阻抗匹配垂直光波导耦合器。
DOI: 10.1364/oe.16.011682
发表时间: 2008
期刊: Optics express
影响因子: 3.8
作者:
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通讯作者: J. Michel
使用各向同性湿法蚀刻和使用蚀刻材料制造低损耗线波导来控制非晶硅的纳米级厚度
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发表时间: 2012
影响因子: 4
作者:
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通讯作者: Y. Sakakibara