Magnetic Properties and Coercivity of MnGa Films Deposited on Different Substrates

Magnetic Properties and Coercivity of MnGa Films Deposited on Different Substrates
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不同基底上沉积的MnGa薄膜的磁性能和矫顽力

DOI:
10.1016/j.jmst.2016.04.010
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发表时间:
2017-05
影响因子:
10.9
通讯作者:
Z.D. Zhang
Z.D. Zhang
中科院分区:
材料科学1区
文献类型:
--
作者:
J.N. Feng;W. Liu;W.J. Gong;X.G. Zhao;D. Kim;C.J. Choi;Z.D. Zhang

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采用磁控溅射法在热氧化的Si(Si/SiO2)和玻璃衬底上生长了MnGa薄膜。在单晶硅(100)衬底上制备了具有不同衬底的薄膜,并进行了比较。结果表明,Si/SiO2衬底比玻璃衬底更适合于生长高介电常数MnGa薄膜,这是孤立岛状生长的结果。Si/SiO2衬底上生长的10 nm MnGa薄膜在衬底温度TS为450 °C时,薄膜的极化率可达9.7 kOe。通过改变MnGa薄膜的厚度和衬底的温度,确定了优化的实验条件。
MnGa films were grown by magnetron sputtering on thermally oxidized Si (Si/SiO2) and glass substrates. Films grown on single-crystal Si (100) substrate with different underlayers were prepared for comparison. It is found that the Si/SiO2substrate is more suitable for growing high-coercivity MnGa films than the glass substrate, which is the result of the isolated-island-like growth. A coercivity of 9.7 kOe can be achieved for the 10 nm MnGa films grown on Si/SiO2substrate at substrate temperatureTSof 450 °C. Optimized experimental conditions are specified by changing the thickness of the MnGa films and the temperature of the substrates.
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