Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators.
Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators.
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声子晶体薄膜体声波谐振器的数值研究
DOI：
10.3390/nano11102547
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发表时间：
2021-09-28
期刊：
影响因子：
--
通讯作者：
Luo J
中科院分区：
文献类型：
--
作者：
Shi L;Xuan W;Zhang B;Dong S;Jin H;Luo J
Film bulk acoustic resonator (FBAR)-based filters have attracted great attention because they can be used to build high-performance RF filters with low cost and small device size. Generally, FBARs employ the air cavity and Bragg mirror to confine the acoustic energy within the piezoelectric layer, so as to achieve high quality factors and low insertion loss. Here, two-dimensional (2D) phononic crystals (PhCs) are proposed to be the acoustic energy reflection layer for an FBAR (PhC-FBAR). Four kinds of PhC structures are investigated, and their bandgap diagrams and acoustic wave reflection coefficients are analyzed using the finite element method (FEM). Then, the PhCs are used as the acoustic wave reflectors at the bottom of the piezoelectric stack, with high reflectivity for elastic waves in the specific frequency range. The results show that the specific PhC possesses a wide bandgap, which enables the PhC-FBAR to work at a broad frequency range. Furthermore, the impedance spectra of PhC-FBARs are very smooth with few spurious modes, and the quality factors are close to those of traditional FBARs with air cavities, showing the application potential of the PhC-FBAR filters with wide bandwidth and high power capability.
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影响因子：
5.6
作者：
Garcia-Raffi, L. M.;Salmeron-Contreras, L. J.;Romero-Garcia, V.
通讯作者：
Romero-Garcia, V.
DOI：
10.1109/tmtt.2018.2854160
发表时间：
2018-10-01
影响因子：
4.3
作者：
Hagelauer, Amelie;Fattinger, Gernot;Tag, Andreas
通讯作者：
Tag, Andreas
影响因子：
2.4
作者：
Benchabane, S.;Khelif, A.;Laude, V.
通讯作者：
Laude, V.
影响因子：
8.6
作者：
JOHN, S
通讯作者：
JOHN, S
影响因子：
3.6
作者：
Bi, Frank Z.;Barber, Bradley P.
通讯作者：
Barber, Bradley P.