Long-term stability test on on-wafer measurement system in NMIJ
Long-term stability test on on-wafer measurement system in NMIJ
复制标题
NMIJ晶圆上测量系统的长期稳定性测试
DOI：
10.1109/cpem49742.2020.9191694
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
M. Horibe
中科院分区：
文献类型：
--
作者：
R. Sakamaki;M. Horibe
本文报道了采用NMIJ-AIST开发的自动探测系统的片上测量系统长期稳定性的研究结果。对于射频探头在X、Y、z方向和倾斜角度上的坐标，利用测量系统中实际测量到的s参数，可以自动调整其原点。测量持续了3个月，使用相同的校准和验证装置来研究稳定性。采用匹配的传输线作为验证装置。测量到的反射系数的标准差约为- 50 dB，测量到的透射系数的标准差约为- 60 dB。这些偏差值与其他实验室提供的短期测量可重复性相当，即使测量进行了很长时间，即3个月。
The paper reports investigation result of long-term stability for on-wafer measurement system adopting an automatic probing system developed by NMIJ-AIST. To RF probe coordinates in X-, Y-, Z-directions and tilt angle, their origins can automatically be adjusted by using actual measured S-parameter in the measurement system. The measurements were continued for 3 months to investigate on the stability by using same calibration and verification devices. A matched transmission line was used as the verification device. A standard deviation of measured refection coefficient achieved to approximately −50 dB, and that of measured transmission coefficient reached to approximately −60 dB. These deviation values are comparable to the short-term repeatability in measurement presented by other laboratory, even if the measurements are proceeded for long period, i.e. 3 months.
使用高达 300 GHz 的探头背面反射方法进行介电测量演示
影响因子：
1.5
作者：
Sakamaki Ryo;Horibe Masahiro;Yoshida Manabu;Tsurumi Takaaki
通讯作者：
Tsurumi Takaaki