Hydrogenated-amorphous carbon nitride films formed from the dissociative excitation reaction of CH3CN with the microwave-discharge flow of Ar: Correlation of the [N]/([N]+[C]) ratio with the relative number densities of the CH(A2Δ) and CN(B2Σ+) states
Hydrogenated-amorphous carbon nitride films formed from the dissociative excitation reaction of CH3CN with the microwave-discharge flow of Ar: Correlation of the [N]/([N]+[C]) ratio with the relative number densities of the CH(A2Δ) and CN(B2Σ+) states
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由 CH3CN 与微波放电流 Ar 的解离激发反应形成的氢化非晶氮化碳薄膜:[N]/([N]+[C]) 比率与 CH(A2Δ) 相对数密度的相关性) 和 CN(B2Σ+) 状态
DOI:
10.1116/1.1690250
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
K. Yatsui
中科院分区:
文献类型:
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作者:
Haruhiko Ito;H. Miki;K. Namiki;N. Ito;H. Saitoh;Tsuneo Suzuki;K. Yatsui
High-resolution optical emission spectra of the CN(B2Σ+–X2Σ+) and CH(A2Δ–X2Π) transitions were observed in the dissociative excitation reaction of CH3CN with the microwave-discharge flow of Ar. The H2O molecules contained in the starting materials and/or adsorbed on the wall of the apparatus were removed by using P2O5 as a desiccant. The pressure of Ar, PAr, was in the range of 0.1–0.8 Torr. From the simulation analysis of the observed spectra, the ratio of the concentrations of the CH(A2Δ) and CN(B2Σ+) states, NCH(A)/NCN(B), was determined as 0.09–0.41. It was indicated that the CN(B2Σ+) state was formed via the ion–electron recombination as well as the energy transfer from the metastable state of Ar. Based on the correlation between the NCH(A)/NCN(B) and [N]/([N]+[C]) ratios reported in the system without desiccation [Jpn. J. Appl. Phys. 40, 332 (2001)], the [N]/([N]+[C]) ratio in the desiccated system was predicted to be ≈0.18. The hydrogenated-amorphous carbon nitride films prepared under the conditio...
DOI:
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发表时间:
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期刊:
影响因子:
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作者:
通讯作者:
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DOI:
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发表时间:
--
期刊:
影响因子:
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作者:
通讯作者:
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影响因子:
1.5
作者:
Haruhiko Ito;H. Miki;K. Namiki;N. Ito;H. Saitoh
通讯作者:
Haruhiko Ito;H. Miki;K. Namiki;N. Ito;H. Saitoh