Surface Adhesion Control of Patterned Perfluoro Polymer for Release Technology in theμTAS Fabrication Process
Surface Adhesion Control of Patterned Perfluoro Polymer for Release Technology in theμTAS Fabrication Process
复制标题
μTAS 制造过程中用于脱模技术的图案化全氟聚合物的表面粘附控制
DOI:
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复制
发表时间:
2009
期刊:
影响因子:
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通讯作者:
T. Kobayashi and S. Konishi
中科院分区:
文献类型:
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作者:
桂啓志;水本将之;大貝猛;香川明男;田川泰;T. Kobayashi and S. Konishi
影响因子:
3
作者:
S. Vogel;H. Schonhorn
通讯作者:
H. Schonhorn
DOI:
10.1109/memsys.2007.4433083
发表时间:
2007
期刊:
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子:
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作者:
Yusaku Watanabe;Masanori Maeda;N. Yaji;R. Nakamura;Hiroshi Iseki;M. Yamato;T. Okano;Sadao Hori;Satoshi Konishi
通讯作者:
Satoshi Konishi
影响因子:
8.4
作者:
S. Konishi;Taizou Kobayashi;Hidehiro Maeda;S. Asajima;M. Makikawa
通讯作者:
M. Makikawa