Fabrication of indium phosphide compound photonic crystal by hydrogen iodide/xenon inductively-coupled-plasma etching
Fabrication of indium phosphide compound photonic crystal by hydrogen iodide/xenon inductively-coupled-plasma etching
复制标题
碘化氢/氙感应耦合等离子体刻蚀制备磷化铟复合光子晶体
DOI:
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复制
发表时间:
2004
期刊:
影响因子:
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通讯作者:
Masayuki Fujita
中科院分区:
文献类型:
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作者:
K.Ishihara;M.Fujita;M.Fujita;冨士田誠之;冨士田誠之;K.Kounoike;Masayuki Fujita;Masayuki Fujita;Masayuki Fujita
DOI:
10.1109/cleopr.2003.1274628
发表时间:
2003
期刊:
CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671)
影响因子:
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作者:
M. Fujita;Y. Akahane;A. Sugitatsu;T. Asano;S. Noda
通讯作者:
S. Noda
影响因子:
1.5
作者:
N. Ikegami;A. Yabata;T. Matsui;Jun Kanamori Horiike
通讯作者:
Jun Kanamori Horiike