Figuring of plano-elliptical neutron focusing mirror by local wet etching.
Figuring of plano-elliptical neutron focusing mirror by local wet etching.
复制标题
局部湿法刻蚀平椭圆中子聚焦镜的造型。
DOI：
10.1364/oe.17.006414
复制
发表时间：
2009
期刊：
影响因子：
3.8
通讯作者：
S. Shimada
中科院分区：
文献类型：
--
作者：
K. Yamamura;M. Nagano;H. Takai;N. Zettsu;Dai Yamazaki;R. Maruyama;K. Soyama;S. Shimada
提出了局部湿法蚀刻技术制备高性能非球面反射镜。在此过程中，仅通过在物镜表面蚀刻去除面向小喷嘴的有限区域。通过对喷嘴头部进行数控扫描，确定地制造出所需的物镜形状。利用该技术，成功地制作了聚焦中子束的平面椭圆反射镜，其图形精度小于0.5微米，聚焦增益为6。强而细的聚焦中子束有望成为分析各种材料性质的有用工具。
Local wet etching technique was proposed to fabricate high-performance aspherical mirrors. In this process, only the limited area facing to the small nozzle is removed by etching on objective surface. The desired objective shape is deterministically fabricated by performing the numerically controlled scanning of the nozzle head. Using the technique, a plano-elliptical mirror to focus the neutron beam was successfully fabricated with the figure accuracy of less than 0.5 microm and the focusing gain of 6. The strong and thin focused neutron beam is expected to be a useful tool for the analyses of various material properties.
影响因子：
4.1
作者：
Namba, Y.;Shimomura, T.;Yamashita, K.
通讯作者：
Yamashita, K.