Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films
Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films
复制标题
超薄四面体非晶碳膜中的应力降低取决于碳离子的入射角
DOI：
10.1063/1.4870968
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发表时间：
2014-04
影响因子：
4
通讯作者：
Wang Aiying
中科院分区：
文献类型：
--
作者：
Xu Shipeng;Li Xiaowei;Huang Meidong;Ke Peiling;Wang Aiying
采用实验和模拟相结合的方法研究了四面体非晶碳膜（ta-C）的应力随碳离子入射角的变化规律。当C离子入射角为0 ° ~ 30 °时，残余应力约为3.6 ± 0.1GPa，当入射角为60 °时，残余应力显著降低到2.8GPa。与以往报道不同的是，在这种情况下，sp（3）含量和膜的机械性能都没有恶化。通过分子动力学模拟，特别指出了畸变C-sp（3）键长和键角的临界弛豫在异常应力降低机制中的关键作用。研究结果为制备低应力、高硬度的碳纳米管薄膜提供了一条途径。(C)2014 AIP出版有限责任公司。
We presented the combined experimental and simulation study on stress evolution as a function of incident angles of carbon ions for the ultrathin tetrahedral amorphous carbon films (ta-C). The residual stress was found about 3.6 +/- 0.1 GPa for the incident angle of C ions with range of 0 degrees-30 degrees, while it decreased significantly to 2.8 GPa with the incident angle of 60 degrees. Different with the previous reports, noted that in this case both the sp(3) content and mechanical properties of film were not deteriorated. Taking molecular dynamics simulation, it was in particularly concluded that the critical relaxation of distorted C-sp(3) bond lengths and bond angles played key role on the unusual stress reduction mechanism. The results provide a route to fabricate the ultrathin ta-C films with low stress and high hardness for the precision wear resistant applications. (C) 2014 AIP Publishing LLC.
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影响因子：
10.9
作者：
M. Joe;M. Moon;J. Oh;Kyu Hwan Lee;Kwang-Ryeol Lee
通讯作者：
M. Joe;M. Moon;J. Oh;Kyu Hwan Lee;Kwang-Ryeol Lee
影响因子：
4
作者：
B. Chen;X. W. Sun;B. Tay;L. Ke;S. Chua
通讯作者：
B. Chen;X. W. Sun;B. Tay;L. Ke;S. Chua
影响因子：
3.7
作者：
Ferrari, AC;Robertson, J
通讯作者：
Robertson, J
影响因子：
10.9
作者：
Aiying Wang;Kwang-Ryeol Lee;Jae-pyoung Ahn;J. Han
通讯作者：
Aiying Wang;Kwang-Ryeol Lee;Jae-pyoung Ahn;J. Han
影响因子：
5.4
作者：
M. Gradowski;A. Ferrari;R. Ohr;B. Jacoby;H. Hilgers;H.-H. Schneider-H.;H. Adrian
通讯作者：
M. Gradowski;A. Ferrari;R. Ohr;B. Jacoby;H. Hilgers;H.-H. Schneider-H.;H. Adrian