Computational model of inductively coupled plasma sources in comparison to experimental data for different torch designs and plasma conditions. Part II: theoretical model

Computational model of inductively coupled plasma sources in comparison to experimental data for different torch designs and plasma conditions. Part II: theoretical model
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电感耦合等离子体源的计算模型与不同炬管设计和等离子体条件的实验数据的比较第二部分:理论模型

DOI:
10.1039/c6ja00192k
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发表时间:
2017
影响因子:
3.4
通讯作者:
C. Engelhard
C. Engelhard
中科院分区:
化学2区
文献类型:
--
作者:
M. Voronov;V. Hoffmann;W. Buscher;C. Engelhard

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本计算研究提出了一个基于LTE的模型(LTE:局部热力学平衡)和一个在标准法塞尔型火炬中工作的电感耦合等离子体(ICP)的双温度模型。此外,本文还首次建立了低氩气流量火炬的计算模型,该火炬的氩气流量仅为0.6 L min - 1。后者是对ICP火炬的特殊修改,其中Ar冷却气流被压缩空气的外部流所取代。这两种模型包括对火炬壁温度和火炬内切向氩流的全面模拟。它也可以应用于其他新的几何形状的ICP火炬。两个火炬的等离子体特性在广泛的操作参数范围内进行了模拟。通过将模拟的电学和内部ICP特性与实验数据进行比较,验证了模型的有效性。
This computational study present a LTE-based model (LTE: local thermodynamic equilibrium) and a two-temperature model of an inductively coupled plasma (ICP) operated in a standard Fassel-type torch. In addition, a computational model for a low-argon-flow torch, which consumes only 0.6 L min−1 of Ar, is presented for the first time. The latter is a special modification of the ICP torch, where the Ar cooling gas stream is replaced by an outer stream of compressed air. The two models include a comprehensive simulation of torch wall temperature as well as tangential Ar flow inside the torches. It can also be applied to other new geometries of ICP torches. Plasma properties in both torches are simulated over a wide range of operational parameters. The models are validated by comparing the simulated electrical and internal ICP properties to experimental data.
DOI: --
发表时间: 2014
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