The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge.
The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge.
复制标题
基于MEMS应变片的三轴切削力传感器的研制
DOI：
10.3390/mi9010030
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发表时间：
2018-01-15
期刊：
影响因子：
3.4
通讯作者：
Ge X
中科院分区：
文献类型：
--
作者：
Zhao Y;Zhao Y;Ge X
切削力测量是机械加工过程中状态监测的一项重要任务。在过去，已经开发了许多切削力传感器，每种传感器都具有不同的性能优势。为了提高测量灵敏度和减小交叉干扰误差，提出了一种基于商用微机电系统（MEMS）应变片的三轴切削力传感器。设计了一种由两个相互垂直的八角环组成的弹性敏感元件用于三轴切削力测量，并通过静态标定推导出解耦矩阵以减少交叉干扰。静态标定结果表明，该传感器在三轴方向上的灵敏度分别为0.32 mV/N、0.32 mV/N和0.05 mV/N，所提出的解耦矩阵能够将交叉干扰误差分别减小到0.14%、0.25%和4.42%。动态切削力测量结果表明，该传感器能很好地反映切削过程中切削力的变化情况，满足实际应用中三轴切削力测量的要求。
Cutting force measurement is a quintessential task for status monitoring during machining. In the past, a number of cutting force sensors have been developed, each featuring a different set of performance advantages. In a pursuit to improve the measuring sensitivity and reduce the cross-interference error, in this paper we propose a triaxial cutting force sensor based on a commercial micro-electro-mechanical system (MEMS) strain gauge. An elastic-sensitive element comprised of two mutual-perpendicular octagonal rings is designed for triaxial cutting force measurement, and a decoupling matrix is derived from static calibration to reduce cross-interference. It can be concluded from static calibration that the sensor’s sensitivity is 0.32 mV/N, 0.32 mV/N, and 0.05 mV/N in triaxial directions, and the proposed decoupling matrix is able to reduce cross-interference error to 0.14%, 0.25%, and 4.42%. Dynamic cutting force measurement shows that the cutting force sensor can reflect the variation of cutting status very well, it is qualified to measure triaxial cutting forces in practical applications.
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转弯时进行三轴切割力测量的高性能传感器。
DOI：
10.3390/s150407969
发表时间：
2015-04-03
期刊：
Sensors (Basel, Switzerland)
影响因子：
--
作者：
Zhao Y;Zhao Y;Liang S;Zhou G
通讯作者：
Zhou G
DOI：
10.1016/s0890-6955(00)00065-1
发表时间：
2001-01-01
影响因子：
14
作者：
Andersson, C;Ståhl, JE;Hellbergh, H
通讯作者：
Hellbergh, H
影响因子：
4.1
作者：
Teti, R.;Jemielniak, K.;Dornfeld, D.
通讯作者：
Dornfeld, D.
DOI：
10.1016/0890-6955(94)e0025-e
发表时间：
1995-06-01
影响因子：
14
作者：
JIN, WL;VENUVINOD, PK;WANG, X
通讯作者：
WANG, X
影响因子：
4.6
作者：
Zhao, You;Zhao, Yulong;Hu, Tengjiang
通讯作者：
Hu, Tengjiang