Nanoscale Positional Recognition of Multiple Probes of a Multiple-Scanning-Probe Microscope
Nanoscale Positional Recognition of Multiple Probes of a Multiple-Scanning-Probe Microscope
复制标题
多扫描探针显微镜的多个探针的纳米级位置识别
DOI：
10.1541/ieejeiss.127.1314
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发表时间：
2007
影响因子：
--
通讯作者：
T. Nakayama
中科院分区：
文献类型：
--
作者：
S. Higuchi;Olivier Laurent;K. Obori;T. Nakayama
为了满足测量纳米级物体物理性质（电学、光学、磁学和其他性质）日益增长的需求，多扫描探针显微镜（MPSPM）是测量纳米结构和纳米器件物理性质的强大工具之一。然而，一般来说，在实际性能测量之前很难在纳米级区域中操作多个探针并测量探针之间的距离。为了解决这个难题，我们开发了一种专门用于多扫描探针测量的控制系统，并将该系统与我们自制的在空气中运行的MPSPM一起使用。在本文中，我们报道了如何利用样本扫描方法实现四个探针之间纳米级位置关系的安全、轻松识别。我们首次展示了使用四个独立控制的探头同时获取四个 STM 图像。所有四个图像都涉及样品表面上的相同区域，表明四个探头扫描了同一区域。使用四个 STM 图像，我们计算了描述四个 STM 图像之间（换句话说，四个探针与样品接触点之间）纳米级位置关系的位移矢量。图 1 显示了使用四个独立反馈控制的 STM 探头同时采集的四个 STM 图像。我们可以发现，四张图像中存在相同的特征，如图中黑色箭头所示。这意味着四个探头彼此足够近，可以对样品表面上的同一区域进行成像。更重要的是，尽管由于探针形状的不同，亮点的形状和大小有所不同，但这种STM图像中可能存在的畸变对于四个不同的图像来说似乎是相同的。使用这些图像，我们计算了图像之间的互相关因子，以确定两个图像之间的移位向量。最后，我们确定了四幅图像中任意两幅图像之间的所有位移矢量，并且我们可以纯粹通过数学计算来重叠STM图像中的相同特征，如图2所示。需要指出的是，位移矢量的确定相当于纳米尺度上探针位置的确定。这些结果是通过开发专门用于 MPSPM 测量的集成控制系统以及对我们自制的 MPSPM 进行适当修改而获得的。在本文中，我们还解释了这种开发和修改，这是我们工作的本质。这是 MPSPM 测量在纳米技术中进一步应用的重要成就。这项工作得到了日本文部科学省主导项目的支持。
In order to give a solution to increasing demands for measuring physical properties (electrical, optical, magnetic, and other properties) of nanoscale objects, multiple-scanning-probe microscopes (MPSPMs) are one of the powerful tools which can measure physical properties of nanostructures and nanodevices. However, it is, in general, difficult to operate multiple probes in a nanoscale region and to measure probe-to-probe distance before the actual property measurements. To solve such difficulty, we have developed a control system specialized for multiplescanning-probe measurements and used the system with our home-made MPSPM operated in air. In this paper, we report that how to realize safe and easy recognition for nanoscale positional relationship between four probes by applying sample scanning method. we show, for the first time, simultaneously acquired four STM images using four independently-controlled probes. All of the four images involve the identical area on the sample surface, indicating that the four probes have scanned over the same area. Using the four STM images, we have calculated the shift vectors which describe nanoscale positional relationships between the four STM images, in other words, between four probe-to-sample contact points. Fig. 1 shows simultaneously acquired four STM images using four independently feedback-controlled STM probes. We can find that there are identical features in the four images as indicated by black arrows in the figure. This means that the four probes are enough close with each other to image the same area on the sample surface. More importantly, distortions which may exist in this kind of STM image appears to be the same for the four different images, although the shapes and sizes of the bright spots are somewhat different due to the difference of the shape of the probes. Using such images, we have calculated cross-correlation factor between the images to determine the shift vector between two images. Finally, we have determined all the shift vectors between any two of the four images, and we could overlap the identical features in the STM images purely from the mathematical calculations as shown in Fig. 2. It is important to point out that the determination of the shift vectors is equivalent to the determination of the probe positions at the nanometer scale. These results are obtained as a result of development of integrated control system specialized for MPSPM measurements and appropriate modification of our home-made MPSPM. In this paper, we also explain about such development and modification which are the essence of our work. This is an important achievement towards further applications of MPSPM measurements in nanotechnology. This work is supported by the Leading Project, sponsored by the Ministry of Education, Culture, Sports, Science and Technology, Japan.
影响因子：
1.5
作者：
K. Takami;M. Akai‐Kasaya;A. Saito;M. Aono;Y. Kuwahara
通讯作者：
K. Takami;M. Akai‐Kasaya;A. Saito;M. Aono;Y. Kuwahara