Multiple Intelligence Theory and Foreign Language Learning: A Brain-based Perspective

Multiple Intelligence Theory and Foreign Language Learning: A Brain-based Perspective
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多元智能理论与外语学习:基于大脑的视角

DOI:
10.6018/ijes.4.1.48141
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发表时间:
2004
影响因子:
1.2
通讯作者:
Carmen Fonseca
Carmen Fonseca
中科院分区:
--
文献类型:
--
作者:
Jane Arnold;Carmen Fonseca

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本发明公开了一种等离子体蚀刻方法,该等离子体蚀刻方法可以通过高速蚀刻在基板上形成凹部和/或开口部,并且不会损坏形成在基板表面上的元件部。在半导体衬底上,通过将高频电力施加到反应气体并由此产生等离子体的蚀刻,形成凹部和/或开口部,所述半导体衬底的一个表面作为元件部分形成表面,另一个表面上具有绝缘膜作为蚀刻表面。基板设置在具有接地电位的电极上,绝缘膜位于下侧,并且具有接地电位的导电部分材料设置在基板周围。当导电部分材料的一端与基板的蚀刻表面侧接触时,在基板的表面上产生的电荷移动到导电部分材料,并且基板的电势降低。
A plasma etching method, which can form concave parts and/or opening parts on a substrate by performing etching at a high speed and does not damage an element part formed on the surface of the substrate, is disclosed. On a semiconductor substrate with one surface as an element part forming surface and the other surface having an insulating film thereon as an etching surface are formed concave parts and/or opening parts by means of etching by applying a high-frequency electric power to a reactive gas and generating plasma thereby. The substrate is disposed on an electrode having grounded electric potential with the insulating film positioned on the lower side and a conductive part material having grounded electric potential is disposed around the substrate. When one end of the conductive part material is contacted with the side of the etching surface of the substrate, electric charge generated on the surface of the substrate moves to the conductive part material, and the electric potential of the substrate is lowered.
“思想家——孩子们——”
DOI: --
发表时间: 2007
期刊: 国際ビエンナーレ「ユーモアと風刺展」
影响因子: --
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期刊: --
影响因子: --
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期刊: 関西大学人間活動理論研究センターCHAT Technical Reports No.6
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