Vertical membrane microvalves in PDMS

Vertical membrane microvalves in PDMS
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PDMS 中的垂直膜微型阀

DOI:
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发表时间:
2015
期刊:
IEEE/LEOS International Conference on Optical MEMS
影响因子:
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通讯作者:
Wouter van der Wijngaart
Wouter van der Wijngaart
中科院分区:
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文献类型:
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作者:
J. Hansson;Mikael Hillmering;T. Haraldsson;Wouter van der Wijngaart

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介绍了第一种密封立式膜气动微阀的设计、实现和评价。与水平膜微阀相比,垂直膜微阀配置的设计自由度使每个占地面积的流量增加了两个数量级。
We present the design, realization and evaluation of the first leak-tight vertical membrane pneumatic microvalve. The design freedom in the vertical valve configuration allows for a flow throughput per footprint area that is increased two orders of magnitude compared to horizontal membrane microvalves.
DOI: 10.1126/science.288.5463.113
发表时间: 2000-04-07
期刊: SCIENCE
影响因子: 56.9
作者:
Unger, MA;Chou, HP;Quake, SR
通讯作者: Quake, SR