Large-area epitaxial growth of MoSe2 via an incandescent molybdenum source

Large-area epitaxial growth of MoSe2 via an incandescent molybdenum source
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通过白炽钼源大面积外延生长 MoSe2

DOI:
10.1088/1361-6528/aa8b81
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发表时间:
2015-09
期刊:
影响因子:
3.5
通讯作者:
Iam Keong Sou
Iam Keong Sou
中科院分区:
材料科学3区
文献类型:
--
作者:
Man Kit Cheng;Jing Liang;Ying Hoi Lai;Liang Xi Pang;Yi Liu;Jun Ying Shen;Jian Qiang Hou;Qing Lin He;Bo Chao Xu;Jun Shu Chen;Gan Wang;Chang Liu;Rolf Lortz;Iam Keong Sou

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我们研制了一种白炽源来制备大面积单晶MoSe2薄膜。用透射电子显微镜、能谱、原子力显微镜、拉曼光谱、光致发光(PL)、反射高能电子衍射(RHEED)和角分辨光电子能谱(ARPES)对MoSe2薄膜进行了表征。在1591 cm−1处发现了一个新的拉曼特征峰。拉曼光谱、光致发光、RHEED和ARPES的研究结果一致表明,该技术可以获得大面积的MoSe_2单晶单层。与传统方法相比,这项技术具有几个优点,并可以扩展到其他包含低蒸汽压元件的二维层状材料的生长。
We have developed an incandescent Mo source to fabricate large-area single-crystalline MoSe2 thin films. The as-grown MoSe2 thin films were characterized using transmission electron microscopy, energy dispersive x-ray spectroscopy, atomic force microscopy, Raman spectroscopy, photoluminescence (PL), reflection high energy electron diffraction (RHEED) and angular resolved photoemission spectroscopy (ARPES). A new Raman characteristic peak at 1591 cm−1 was identified. Results from Raman spectroscopy, PL, RHEED and ARPES studies consistently reveal that large-area single crystalline mono-layer of MoSe2 could be achieved by this technique. This technique enjoys several advantages over conventional approaches and could be extended to the growth of other two-dimensional layered materials containing a low-vapor-pressure element.
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