A phenomenological model for the description of rotating spokes in HiPIMS discharges
A phenomenological model for the description of rotating spokes in HiPIMS discharges
复制标题
用于描述 HiPIMS 放电中旋转辐条的唯象模型
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
R. Brinkmann
中科院分区：
文献类型：
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作者：
S. Gallian;W. Hitchon;D. Eremin;T. Mussenbrock;R. Brinkmann
在圆形平面磁控管上方的电离区域中，当在HiPIMS制度中驱动放电时，观察到定义明确的高发射率区域。这些区域的特征在于高等离子体密度，并且通常被称为“发言人”。一旦其模式稳定，这些结构在E × B方向上以数百kHz范围内的恒定旋转频率旋转。的现象的唯象模型的发展，在一个系统的非线性耦合偏微分方程的形式。该系统在与结构共同运动的坐标系中解析求解，其解给出了中性密度和施加电子密度形状后的等离子体密度。从平衡的电离，电子损失和恒定的中性再填充，在旋转框架中实现的电子和中性密度的稳态配置。因此，实验观察到的辐条可以简单地通过这种高度减少的现象数量的组合来维持。最后，研究了中性粒子和等离子体密度对物理参数的敏感性。
In the ionization region above circular planar magnetrons, well-defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. These regions are characterized by high plasma density and are often referred to as ‘spokes’. Once their mode is stabilized, these structures rotate in the E × B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear coupled partial differential equations. The system is solved analytically in a frame co-moving with the structure, and its solution gives the neutral density and the plasma density once the electron density shape is imposed. From the balance of ionization, electron loss and constant neutral refilling, a steady-state configuration in the rotating frame is achieved for the electron and neutral densities. Therefore, the spoke experimentally observed can be sustained simply by the combination of this highly reduced number of phenomena. Finally, a study of the sensitivity of neutral and plasma densities to the physical parameters is also given.
高功率脉冲磁控管等离子体的不稳定性：从随机性到周期性
DOI：
10.1088/0022-3727/46/8/084007
发表时间：
2013
期刊：
Journal of Physics D: Applied Physics
影响因子：
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作者：
Winter J;Hecimovic A;De los Arcos T;Böke M;Schulz-von der Gathen V
通讯作者：
Schulz-von der Gathen V