Very thick mixture oxide ion beam sputtering films for investigation of nonlinear material properties
Very thick mixture oxide ion beam sputtering films for investigation of nonlinear material properties
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用于研究非线性材料特性的非常厚的混合氧化物离子束溅射薄膜
DOI：
10.1051/epjap/2017170239
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发表时间：
2017
影响因子：
1
通讯作者：
D. Ristau
中科院分区：
文献类型：
--
作者：
M. Steinecke;K. Kiedrowski;M. Jupé;D. Ristau
目前，光学镀膜技术正面临着许多新的挑战。一些新的要求是针对复杂涂层的光谱行为，但除此之外，功率处理能力也变得越来越重要。通常，这两种要求结合在同一个组件中，例如在超短脉冲应用的啁啾反射镜中。因此，对层厚度的准确性和折射率的稳定性的要求要求通过溅射工艺沉积。对于高端部件，离子束溅射（IBS）通常是选择的方法。利用共溅射技术，IBS还通过将两种纯氧化物混合到一种三元复合材料中，从而在可能的涂层材料中具有更高的灵活性。这些复合材料也有利于研究三阶非线性效应，这些效应会限制光学器件在高功率下的功能。这项基础研究所需的层厚度通常超过100µm，因此层材料必须具有低应力和低吸收性。这些决定性性质的降低可以通过对样品进行热处理来实现。通常，这是通过沉积后退火来完成的。或者，可以提高涂层温度。这在IBS工艺中很少做，但可以假设，其效果与非原位退火相当。本文研究了Al2O3/SiO2、HfO2/Al2O3和Nb2O5/Al2O3的不同三元混合物在原位温度处理和制造后退火下的层应力和吸收特性。观察到，适当的热处理和材料成分可以显著降低沉积层的层应力和吸收。这使得制造厚度超过180微米的层以及测量沉积材料的非线性特性成为可能。
Currently, optical coating technology is facing a multitude of new challenges. Some of the new requirements are addressed to the spectral behavior of complex coatings, but in addition, the power handling capabilities gain in importance. Often, both demands are combined in the same component, for example in chirped mirrors for ultra-short pulse applications. The consequent demands on the accuracy of the layer thicknesses and the stability of the refractive indices require a deposition by sputtering processes. For high end components, Ion Beam Sputtering (IBS) is often the method of choice. Utilizing the Co-sputtering technique, IBS additionally allows a higher flexibility in the possible coating materials by mixing two pure oxides into one ternary composite material. These composite materials are also advantageous for researching third order nonlinear effects, which can limit the functionality of optics at high powers. The layer thicknesses required for this fundamental research often exceed 100 µm, which therefore makes low stress and absorption in the layer materials mandatory. A reduction of these decisive properties can be achieved by a thermal treatment of the sample. Usually, this is performed by a post-deposition annealing. Alternatively, the coating temperature can be increased. This is rarely done for IBS processes, but it can be assumed, that the effect is comparable to that of ex-situ annealing. In this work, different ternary mixtures of Al2O3/SiO2, HfO2/Al2O3as well as Nb2O5/Al2O3were investigated for their layer stress and absorption, applying both, in-situ temperature treatment as well as post manufacturing annealing. It is observed that suitable thermal treatment as well as material composition can significantly reduce layer stress and absorption in the deposited layer. This enabled the manufacturing of layers with thicknesses of over 180 µm as well as the measurement of nonlinear properties of the deposited materials.
光学多层膜非线性响应的实验和数值研究。
影响因子：
3.8
作者：
T. Amotchkina;M. Trubetskov;V. Pervak
通讯作者：
V. Pervak
影响因子：
1.9
作者：
Stenzel, Olaf;Wilbrandt, Steffen;Tuennermann, Andreas
通讯作者：
Tuennermann, Andreas
广域巡天望远镜LSST大型带通滤波器的研制
影响因子：
1.9
作者：
B. Sassolas;J. Teillon;R. Flaminio;C. Michel;N. Morgado;L. Pinard
通讯作者：
L. Pinard