Modeling carbon coverage on polar GaN surfaces during MOVPE
Modeling carbon coverage on polar GaN surfaces during MOVPE
复制标题
MOVPE 期间对极性 GaN 表面上的碳覆盖进行建模
DOI：
10.35848/1347-4065/ab80e2
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发表时间：
2020
影响因子：
1.5
通讯作者：
Y. Kangawa
中科院分区：
文献类型：
--
作者：
Daichi Yosho;Yuya Inatomi;Y. Kangawa
采用结合组态熵的理论模型计算了MOVPE过程中极性GaN表面的碳覆盖率。一般来说，具有最低能量的表面重构是通过从头算方法来探索的。另一方面，该模型可以讨论其他表面的出现概率。因此，可以分析表面上微量元素的覆盖率。本研究从理论上揭示了MOVPE条件下源气比、总压、载气比对表面碳覆盖率的影响。此外，还讨论了碳覆盖率的取向依赖性及其掺入机理。
Carbon coverage on polar GaN surfaces during MOVPE were calculated by a theoretical model which incorporates configurational entropy. Generally, surface reconstruction with the lowest energy was explored by an ab initio-based approach. On the other hand, appearance probability of the other surfaces can be discussed by the model. Therefore, coverage of minor elements on the surfaces can be analyzed. In this research, influence of source gas ratio, total pressure, and carrier gas ratio of MOVPE conditions on the carbon coverage on the surfaces was revealed theoretically. Furthermore, orientation dependence of carbon coverage and its incorporation mechanism were discussed.
影响因子：
29.4
作者：
Tanaka, Atsunori;Choi, Woojin;Dayeh, Shadi A.
通讯作者：
Dayeh, Shadi A.
影响因子：
3.2
作者：
Kaess, Felix;Mita, Seiji;Sitar, Zlatko
通讯作者：
Sitar, Zlatko