Initial tests of large format sensors for the ATLAS ITk strip tracker
Initial tests of large format sensors for the ATLAS ITk strip tracker
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ATLAS ITk 带状跟踪器大幅面传感器的初步测试
DOI：
10.1016/j.nima.2020.164677
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Klein C
中科院分区：
文献类型：
--
作者：
Klein C
作为高亮度（HL）LHC ATLAS探测器第二阶段升级计划的一部分，内部跟踪器（ITk）的建设，长带（LS）和短带（SS）n+-in-p型微带传感器已由滨松光子学和英飞凌生产。全尺寸传感器的尺寸约为98× 98 mm 2，设计和工程公差为9.7× 10 14 1 MeV n eq/cm 2的预期在HL-LHC的通量，包括安全系数为1.5。每个传感器有2列或4列1280个单独的通道，以75.5 μ m的水平间距排列。为了确保传感器符合其规格，实施了质量控制（QC）程序，包括对每个传感器以及样本进行测量。每个传感器都经过初步目视检查，之后通过自动相机设置以非常高的分辨率捕获传感器的整个表面。执行非接触计量以获得传感器表面轮廓。然后自动进行建立反向偏置漏电流和耗尽电压的电气测量。每批样品传感器在受控气氛中进行40 h的泄漏稳定性检查，并对测量泄漏电流、耦合电容和偏置电阻的每个通道进行测试。记录的结果在数据质量检查后上传到生产数据库。本文介绍了第一批生产级传感器的QC测试验证数据和汇编结果。对QC方案进行了确认，并确认第一批生产传感器符合质量标准。将结果与上一代原型传感器的结果进行比较。
For the construction of the Inner Tracker (ITk) as part of the phase-II upgrade programme of the ATLAS detector for the High-Luminosity (HL) LHC, batches of Long Strip (LS) and Short Strip (SS) n+-in-p type micro-strip sensors have been produced by Hamamatsu Photonics and Infineon. The full size sensors measure approximately 98× 98 mm 2 and are designed and engineered for tolerance against the 9.7× 10 14 1 MeV n eq/cm 2 fluence expected at the HL-LHC, including a safety factor of 1.5. Each sensor has 2 or 4 columns of 1280 individual channels arranged at 75.5 μ m horizontal pitch. To ensure the sensors comply with their specifications, a Quality Control (QC) procedure has been implemented, comprising measurements on every individual sensor as well as on a sample basis. Every sensor is subjected to an initial visual inspection, after which the full surface of the sensor is captured with very high resolution by an automated camera setup. Non-contact metrology is performed to obtain the sensor surface profile. Electrical measurements establishing the reverse bias leakage current and depletion voltage are then conducted automatically. Sample sensors from every batch are subjected to 40 h of leakage stability checks in controlled atmosphere, and tests on every channel measuring leakage current, coupling capacitance and bias resistance are done. The recorded results are uploaded to a production database following data quality checks. In this paper, QC test validation data and the compiled results for the first batches of production grade sensors are presented. The QC protocol was validated, and the first production sensors were confirmed to be within specification. The results are compared to those from the previous generation of prototype sensors.
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DOI：
10.1016/j.nima.2016.03.042
发表时间：
2016
期刊：
Accelerators, Spectrometers, Detectors and Associated Equipment
影响因子：
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作者：
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通讯作者：
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DOI：
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发表时间：
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影响因子：
1.4
作者：
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Unno, Y.
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DOI：
10.17863/cam.45814
发表时间：
2020
影响因子：
1.4
作者：
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DOI：
--
发表时间：
2019
期刊：
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
影响因子：
--
作者：
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通讯作者：
V. Zahradník