Scale-dependent roughness parameters for topography analysis

Scale-dependent roughness parameters for topography analysis
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用于形貌分析的尺度相关粗糙度参数

DOI:
10.1016/j.apsadv.2021.100190
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发表时间:
2021
影响因子:
6.2
通讯作者:
Pastewka, Lars
Pastewka, Lars
中科院分区:
--
文献类型:
--
作者:
Sanner, Antoine;Nohring, Wolfram G.;Thimons, Luke A.;Jacobs, Tevis D.;Pastewka, Lars

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粗糙度参数无法预测表面特性源于其固有的尺度依赖性;换句话说,测量值取决于参数的测量方式。在这里,我们利用这种尺度依赖性来开发一个表征粗糙表面的新框架:尺度相关粗糙度参数(SDRP)分析,它可以产生多个尺度上表面形貌的斜率、曲率和高阶导数,甚至对于单个形貌测量也是如此。我们演示了 SDRP 和其他用于分析表面的常见统计方法之间的关系:高度差自相关函数 (ACF)、可变带宽方法 (VBM) 和功率谱密度 (PSD)。我们使用计算机生成和测量的地形来展示 SDRP 分析的优势,包括:跨尺度表征表面的新颖指标以及测量伪影的检测。 SDRP 是一个通用框架,用于对表面形貌进行尺度相关分析,可生成直观易懂的指标。
The failure of roughness parameters to predict surface properties stems from their inherent scale-dependence; in other words, the measured value depends on how the parameter was measured. Here we take advantage of this scale-dependence to develop a new framework for characterizing rough surfaces: the Scale-Dependent Roughness Parameters (SDRP) analysis, which yields slope, curvature, and higher-order derivatives of surface topography at many scales, even for a single topography measurement. We demonstrate the relationship between SDRP and other common statistical methods for analyzing surfaces: the height-difference autocorrelation function (ACF), variable bandwidth methods (VBMs) and the power spectral density (PSD). We use computer-generated and measured topographies to demonstrate the benefits of SDRP analysis, including: novel metrics for characterizing surfaces across scales, and the detection of measurement artifacts. The SDRP is a generalized framework for scale-dependent analysis of surface topography that yields metrics that are intuitively understandable.
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