Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics
Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics
复制标题
用于改善 ZrO2 陶瓷微腔表面质量的火花辅助化学雕刻 (SACE) 能量作用模型
DOI：
10.1088/1361-6439/ab92ec
复制
发表时间：
2020-05
影响因子：
2.3
通讯作者：
Yubin Pu
中科院分区：
文献类型：
--
作者：
Bolin Ji;Hao Tong;Xiaofan Han;Yong Li;Yubin Pu
ZrO2陶瓷具有广泛的应用，例如涡轮叶片的热障涂层（TBC），微致动器和气体传感器。然而，由于这种材料的高硬度和脆性，对机械加工具有挑战性。虽然火花辅助化学雕刻（SACE）可以用于加工ZrO2陶瓷，但由于ZrO2的熔点远高于玻璃的熔点，传统的玻璃SACE模型难以适用于ZrO2陶瓷。将SACE工艺应用于ZrO2陶瓷的理论基础仍然缺乏，这使得将SACE工艺应用于ZrO2陶瓷中具有高表面质量的微腔的加工非常具有挑战性。通过分析SACE的能量传递过程，提出了基于加工电压、脉冲宽度和加工间隙的能量作用模型。能量模型表达了物理去除和化学去除的火花能量差异。通过加工实验，发现了SACE工艺对ZrO2陶瓷的接触效应，阐明了SACE工艺对加工间隙敏感的原因。在此基础上，建立了有或无电极端放电约束的物理和化学去除过程模型。利用上述理论模型，采用SACE工艺在ZrO2陶瓷工件表面获得了无微裂纹的环形微腔，其调节能量效应趋向于化学去除。此外，考虑到接触效应和ZrO2陶瓷SACE扫描过程中应用的工艺模型，采用弹簧结构的工具电极来解决微工具电极的弯曲问题。成功地加工出了具有高表面质量的方形微腔体。
ZrO2 ceramic has a wide range of applications, such as in the thermal barrier coating (TBC) of turbine blades, micro actuators, and gas sensors. However, this material is challenging to machine due to its high hardness and brittleness. Although spark assisted chemical engraving (SACE) can be used to machine ZrO2 ceramics, the traditional SACE models for glass are difficult to apply to ZrO2 ceramics since the melting point of ZrO2 is much higher than that of glass. A theoretical basis for applying the SACE process to ZrO2 ceramics is still lacking, which makes applying the SACE process to machine micro cavities with high surface quality in ZrO2 ceramics very challenging. This paper proposes an energy action model based on the processing voltage, pulse width and machining gap by analyzing the energy transfer process of SACE. The energy model expresses difference in the spark energy between physical removal and chemical removal. Through machining experiments, the contact effect of the SACE process on ZrO2 ceramics was found, and the reasons why the SACE process is sensitive to the machining gap were clarified. Furthermore, physical and chemical removal process models with or without the discharge constraint onto the end of the tool electrode were established. Using the above theoretical models, a circular ring microcavity without micro cracks on the surface was achieved in a ZrO2 ceramic workpiece by using the SACE process with the regulating energy effect trending to the chemical removal. Additionally, considering the contact effect and the process models applied in the SACE scanning process of ZrO2 ceramics, a tool electrode with a spring structure was employed to solve the bending problem of the micro tool electrode. As a result, a square micro-cavity with high surface quality was machined successfully.
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DOI：
10.1117/12.887500
发表时间：
2011-05
期刊：
--
影响因子：
--
作者：
A. Vasiliev;A. Lipilin;A. S. Lagutin;A. Pisliakov;N. P. Zaretskiy;N. Samotaev;A. Sokolov
通讯作者：
A. Vasiliev;A. Lipilin;A. S. Lagutin;A. Pisliakov;N. P. Zaretskiy;N. Samotaev;A. Sokolov
影响因子：
6.2
作者：
Wei Wang;Zuozhong Liang;Xiang-zhen Han;Jianfeng Chen;Chunyu Xue;Hong Zhao
通讯作者：
Wei Wang;Zuozhong Liang;Xiang-zhen Han;Jianfeng Chen;Chunyu Xue;Hong Zhao
影响因子：
5.3
作者：
M. Wilke;C. Schmidt;J. Dubrail;Karen Appel;M. Borchert;K. Kvashnina;C. Manning
通讯作者：
M. Wilke;C. Schmidt;J. Dubrail;Karen Appel;M. Borchert;K. Kvashnina;C. Manning
影响因子：
6.3
作者：
Yi Xu;Jihong Chen;Baoyang Jiang;J. Ni
通讯作者：
Yi Xu;Jihong Chen;Baoyang Jiang;J. Ni
DOI：
10.1016/j.ijmachtools.2009.07.002
发表时间：
2009-11
影响因子：
14
作者：
H. K. Sezer;Lin Li;S. Leigh
通讯作者：
H. K. Sezer;Lin Li;S. Leigh