Fabrication of PDMS micro through-holes using micromolding in open capillaries
Fabrication of PDMS micro through-holes using micromolding in open capillaries
复制标题
使用开放毛细管中的微成型技术制造 PDMS 微通孔
作者：
K. Zhou;Xiyu Zhu;Yong Li;Ju
提出了一种改进的开放毛细管微成型工艺（MIMIOC），用于对PDMS通孔层进行图案化。此外，转移技术，其中包括通过氧等离子体处理和表面硅烷化改变各层之间的结合强度，被引入，以促进通孔层的释放和结合。通过在SU-8模具上加工直径为50-200 μm的立方体、圆柱体和圆角矩形阵列的PDMS通孔，验证了其性能。通过界面自由能和微槽内液体润湿形态的变化，证明了微成型工艺的可行性及其获得突出角小于2°的平面PDMS层的能力。MIMIOC作为一种结构简单、对设备要求低的方法，将以简单、低成本的方式构图PDMS微孔，为MEMS器件的发展做出贡献。
A modified micromolding process in open capillaries (MIMIOC) is put forward to pattern PDMS through-hole layers. In addition, a transfer technique, which includes changing bonding strengths between each layer by oxygen plasma treatment and surface silanization, is introduced to facilitate the release and bonding of through-holes layers. Its performance is verified by fabricating PDMS through-holes on SU-8 molds with 50–200 μm microstructures of cube, cylinder and rounded rectangle arrays. The feasibility of the micromolding process and its ability to achieve a planar PDMS layer with protruding angle less than 2° is proved by changes of interfacial free energies and wetting morphology of liquid in micro grooves. As a method with simple structure and low requirements for the equipment, MIMIOC would contribute to the development of MEMS devices by patterning PDMS micro through-holes in a simple and low-cost way.
影响因子：
7.4
作者：
Anderson, JR;Chiu, DT;Whitesides, GM
通讯作者：
Whitesides, GM