Mechanical characterization of biocompatible thin film materials by scanning along micro-machined cantilevers for micro-/nano-system
Mechanical characterization of biocompatible thin film materials by scanning along micro-machined cantilevers for micro-/nano-system
复制标题
通过沿着微/纳米系统的微加工悬臂扫描来表征生物相容性薄膜材料
DOI：
10.1016/j.msea.2005.10.081
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发表时间：
2006
期刊：
影响因子：
6.4
通讯作者：
D. Moore
中科院分区：
文献类型：
--
作者：
J. H. He;Jikui Luo;H. Le;D. Moore
力学特性是微纳机电系统（MEMS/NEMS）设计的关键。本文介绍了一种新的表征方法来提取薄膜材料的机械性能，这是简单，廉价和适用于广泛的材料，包括本文所述的生物相容性的。被测材料的光束通过激光微加工形成图案，并通过碱性蚀刻释放。使用表面轮廓仪沿沿着微加工杠杆扫描并产生弯曲轮廓，从中可以提取杨氏模量。制备了生物相容的SiNx、SiC和纳米晶金刚石悬臂梁，其杨氏模量分别为154±12、360±50和504± 50 GPa，与纳米压痕测量的结果一致。用表面轮廓仪提取了残余应力梯度，其结果与ZYGO干涉仪的测量结果一致。该方法可推广到原子力显微镜探针或纳米探针轮廓仪上进行Bio-NEMS力学表征。
Mechanical characterization is vital for the design of micro-/nano-electro-mechanical system (MEMS/NEMS). This paper describes a new characterization method to extract the mechanical properties of the thin film materials, which is simple, inexpensive and applicable to a wide range of materials including biocompatible ones described in this paper. The beams of the material under tests, are patterned by laser micro-machining and released by alkaline etch. A surface profilometer is used to scan along micro-machined cantilevers and produce a bending profile, from which the Young's modulus can be extracted. Biocompatible SiNx, SiC and nanocrystal diamond cantilevers have been fabricated and their Young's modulus has been evaluated as 154±12, 360±50 and 504±50GPa, respectively, which is consistent with those measured by nano-indentation. Residual stress gradient has also been extracted by surface profilometer, which is comparable with the results inferred from ZYGO interferometer measurements. This method can be extended to atomic force microscopy stylus or nanometer-stylus profilometer for Bio-NEMS mechanical characterization.
影响因子：
14
作者：
Voskerician, G;Shive, MS;Langer, R
通讯作者：
Langer, R