Three-Dimensional Shape Measurement Beyond Diffraction Limit for Measurement of Dynamic Events
Three-Dimensional Shape Measurement Beyond Diffraction Limit for Measurement of Dynamic Events
复制标题
超越衍射极限的三维形状测量用于动态事件的测量
DOI：
10.1007/978-981-32-9632-9_1
复制
发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Y. Arai
中科院分区：
文献类型：
--
作者：
Y. Arai
散斑干涉法是测量粗糙表面物体变形的重要方法之一。本文提出了一种适用于动态事件三维形貌测量的方法。在该方法中，通过在计算机存储器中给出已知的横向偏移来检测这种对象的形状的微分系数分布，以便使用单次散斑图案进行分析。通过对微分系数分布进行积分，可以重建三维形状。该方法也可用于衍射极限以外的超微细结构的三维形貌测量。此外，还讨论了侧向位移的大小对形状的影响。
Speckle interferometry is one of the important measurement methods of deformation on an object with rough surfaces. In this paper, a method which can be applied to a three-dimensional (3-D) shape measurement for dynamic events is proposed. In the method, the differential coefficient distribution of the shape of such an object is detected by giving a known lateral shift in the computer memory in order to analyze using one-shot speckle pattern. The 3-D shape can be reconstructed by integrating the differential coefficient distribution. The method is also applied to the 3-D shape measurement of superfine structure beyond the diffraction limit. Furthermore, the influence of magnitude of lateral shift on shape is discussed.
影响因子：
1.3
作者：
Arai, Yasuhiko
通讯作者：
Arai, Yasuhiko
基于空间条纹分析metgid的电散斑干涉测量面内位移
DOI：
--
发表时间：
2004
期刊：
Optical Engineering Vol.43, No.9
影响因子：
--
作者：
Y.Arai;S.Yokozeki
通讯作者：
S.Yokozeki