Spectroscopic diagnostics of active screen plasma nitriding processes: on the interplay of active screen and model probe plasmas
Spectroscopic diagnostics of active screen plasma nitriding processes: on the interplay of active screen and model probe plasmas
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活性屏等离子体渗氮过程的光谱诊断：活性屏和模型探针等离子体的相互作用
DOI：
10.1088/0022-3727/48/34/345204
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
Röpcke
中科院分区：
文献类型：
--
作者：
Hamann;Börner;Burlacov;Röpcke
利用可调谐二极管激光红外吸收(TDLAS)和光学发射光谱(OES)技术，研究了主动屏等离子体氮化(ASPN)中两种等离子体的相互作用：(1)在脉冲直流模式(f=1 kHz，占空比为60%)下驱动的圆柱形有源屏的等离子体；(2)在连续直流模式下驱动的内模探头上的等离子体。应用原位TDLAS对含碳前驱体CH4和CO2以及反应产物NH3、HCN、CO和H2O的演化过程进行了监测。含碳前体分子的离解程度在70%至92%之间变化。反应产物的浓度范围为10~12℃。通过分析混合气体和等离子体功率值变化时分子浓度的变化，发现甲烷混合气体中−和NH3是等离子体转化的主要产物，二氧化碳中主要是CO、HCN和NH3。测定了甲烷和二氧化碳(RF(CH4)≈1)的裂解效率。2×1015个分子J−1，RF(CO2)≈0.5.1.0×10 16分子J−1)及其对产物分子(RC(产物)≈10 13~10 15分子J−1)的转换效率，同时分析了探针等离子体和屏蔽等离子体的影响，即两个等离子体源相互作用引起的现象。模型探头上等离子体的额外使用对反应产物的生成有敏感的影响，特别是NH3和HCN的生成。在OES的帮助下，可以确定屏幕等离子体的旋转温度，它随着功率从770K增加到950K。也随着功率增加氮分子的离子成分，即强度
In a reactor used for active screen plasma nitriding (ASPN) the interplay of two plasma types,(i) the plasma of the cylindrical active screen driven in a pulsed dc mode (f= 1 kHz, 60% duty cycle) and (ii) the plasma at an internal model probe driven in a cw dc mode, ignited in a low pressure H 2–N 2 gas mixture (p= 3 mbar) containing small amounts of CH 4 and CO 2 have been studied by tunable diode laser infrared absorption (TDLAS) and optical emission spectroscopy (OES) techniques. Applying in situ TDLAS the evolution of the carbon containing precursors, CH 4 and CO 2, and of the reaction products, NH 3, HCN, CO and H 2 O, has been monitored. The degree of dissociation of the carbon containing precursor molecules varied between 70% and 92%. The concentrations of the reaction products were found to be in the range 10 12... 10 15 molecules cm− 3. By analyzing the development of the molecular concentrations at changes of gas mixtures and plasma power values, it was found that (i) HCN and NH 3 are the main products of plasma conversion in the case of methane admixture and (ii) CO, HCN and NH 3 in the carbon dioxide case. The fragmentation efficiencies of methane and carbon dioxide (R F (CH 4)≈ 1... 2× 10 15 molecules J− 1, R F (CO 2)≈ 0.5... 1.0× 10 16 molecules J− 1) and the respective conversion efficiencies to the product molecules (R C (product)≈ 10 13–10 15 molecules J− 1) have been determined for different gas mixtures and plasma power values, while the influence of probe and screen plasmas, ie the phenomena caused by the interplay of both plasma sources, was analyzed. The additional usage of the plasma at the model probe has a sensitive influence on the generation of the reaction products, in particular that of NH 3 and HCN. With the help of OES the rotational temperature of the screen plasma could be determined, which increases with power from 770 K to 950 K. Also with power the ionic component of nitrogen molecules, ie the intensity of the
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DOI：
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