Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation
Deposition of diamond-like carbon films on interior surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation
复制标题
增强辉光放电等离子体浸没离子注入在细长石英玻璃管内表面沉积类金刚石碳膜
DOI：
10.1016/j.surfcoat.2014.12.053
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发表时间：
2015-03
影响因子：
5.4
通讯作者：
P. K. Chu
中科院分区：
文献类型：
--
作者：
Y. Xu, L. H. Li,;P. K. Chu
Diamond-like carbon (DLC) films are deposited on the interior surface of 100 mm long quartz glass tubes with inner diameters of 6, 4, and 0.9 mm by enhanced glow discharge plasma immersion ion implantation (EGD-PIII) at 10 kV. The acetylene plasma is generated inside the tube by electrons created in the plasma near the substrate and secondary electrons from ion bombardment. Acetylene gas pressure distribution obtained from finite element method shows that the pressure varies linearly from the inlet to the outlet of the tube. The electron mean free path,λe, and collision frequency,νe, are introduced to qualitatively explain the non-uniform DLC film thickness. Raman scattering indicates that the DLC films at different locations have a similar structure.
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