Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp
Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp
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基于 OrmoStamp 的热纳米压印柔性复合印模
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
H. Scheer
中科院分区：
文献类型：
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作者：
M. Papenheim;C. Steinberg;K. Dhima;Si Wang;H. Scheer
柔性压模对于卷对卷加工是常见的，但对于平面加工不太常见，尽管它们提供了许多益处，例如，在减压下的改进的保形接触。实现这种柔性印模的简单方法是使用具有结构化顶层和柔性背板的两层系统。结构化的顶层最容易通过模制获得，背板提供所设想的灵活性。对于在热纳米压印工艺中的使用，两者都需要高的热稳定性。本研究以OrmoStamp为结构化顶层，聚酰亚胺为柔性背板，制备柔性复合印模。使用OrmoStamp制备印模的推荐工艺必须进行修改，以避免在材料紫外线固化后进行硬烘烤后弯曲，以获得高稳定性的顶层。减少弯曲的建议，特别是对大面积邮票，其中硬烤步骤是在冲突...
Flexible stamps are common for roll-to-roll processing but less common with planar processing, although they offer a number of benefits as, e.g., an improved conformal contact at reduced pressure. A simple way to realize such a flexible stamp is to use a two layer system with a structured top layer and a flexible backplane. The structured top layer is most easily obtained by molding, the backplane provides the flexibility envisaged. For use in a thermal nanoimprint process, a high thermal stability is required for both. This investigation addresses the preparation of flexible composite stamps with OrmoStamp as the structured top layer and polyimide as the flexible backplane. The process recommended for stamp preparation with OrmoStamp has to be modified to avoid bending after the hard bake that is required after ultraviolet-curing of the material to obtain a high stability of the top layer. Reduction of bending is advised, in particular, for large area stamps, where the hard bake step is in conflict with ...
影响因子：
56.9
作者：
JACKMAN, RJ;WILBUR, JL;WHITESIDES, GM
通讯作者：
WHITESIDES, GM