Development of Multilayer Readout Wiring for Large-Format TES X-Ray Microcalorimeter Arrays
Development of Multilayer Readout Wiring for Large-Format TES X-Ray Microcalorimeter Arrays
复制标题
大型 TES X 射线微量热仪阵列多层读出线路的开发
DOI：
10.1109/tasc.2010.2081962
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发表时间：
2011
影响因子：
1.8
通讯作者：
Keiichi
中科院分区：
文献类型：
--
作者：
Ezoe;Yuichiro; Ishisaki;Yoshitaka; Oishi;Shihoko; Abe;Yuki; Ohashi;Takaya; Yoshitake;Hiroshi; Sekiya;Norio; Mitsuda;Kazuhisa; Morooka;Toshimitsu; Tanaka;Keiichi
追求未来天体物理任务的过渡边缘传感器的大阵列的可行性，我们已经进行了多层读出布线的研究。它是由薄的超导信号和返回线制成的铝或铌，夹在绝缘二氧化硅膜。可以减少像素的信号线和返回线之间的自感和互感，以及偏置引线的自屏蔽。此外，必要的空间资源可以是正常布线的一半。我们制作了四种20 × 20的布线样品，其上、下布线宽度分别为10和15 μm。在室温下的电阻测量中，四种阵列的工艺产率均达到95 ~ 97%。在低温下，Al-Al样品表现出明显的超导转变，低剩余电阻1 ~ 2 mΩ，高临界电流> 100 μA，表明它们可以用作TES读出布线。而Nb-Al样品则表现出缓慢的转变和较低的临界电流（<10 μA）。能量色散X射线光谱测量表明，在电接触Al和Nb膜之间的杂质影响这些功能。
Pursuing the feasibility of a large array of transition-edge sensors for future astrophysical missions, we have undertaken a study of multilayer readout wiring. It is composed of thin superconducting signal and return wires made of Al or Nb that sandwich an insulation SiO2film. Self and mutual inductances between signal and return wires of pixels, and also self fielding of bias leads can be reduced. Also a necessary spatial resource can be half compared to a normal wiring. We have fabricated four types of 20 × 20 wiring samples whose upper and lower wiring widths were 10 and 15 μm. High process yields of 95 ~ 97% were confirmed for all the four arrays in resistance measurements at room temperature. At low temperature, Al-Al samples showed sharp superconducting transitions, low residual resistances 1 ~ 2 mΩ, and high critical currents of >; 100 μA, which suggests that they can be used as our TES readout wiring. On the other hand, Nb-Al samples showed slow transitions and low critical currents ( <; 10 μA). Energy dispersive X-ray spectroscopy measurements indicated that impurities between Al and Nb films at electrical contacts influence these features.
微热量计阵列制造进展：X射线吸收器和高密度带状线布线
DOI：
10.1016/j.nima.2005.12.032
发表时间：
2006
影响因子：
1.4
作者：
M. Bruijn;M. Ridder;E. Krouwer;H. Hoevers;P. Korte;J. Kuur
通讯作者：
J. Kuur
影响因子：
8.6
作者：
Sadleir, John E.;Smith, Stephen J.;Clem, John R.
通讯作者：
Clem, John R.
micro-X 高能分辨率微量热仪 X 射线成像火箭的新科学案例
DOI：
10.1063/1.3292368
发表时间：
2009
期刊：
--
影响因子：
--
作者：
E. Figueroa;J. Adams;R. Baker;S. Bandler;T. Delaney;D. Dewey;W. Doriese;M. Eckart;M. Galeazzi;R. Goeke;R. Hamersma;G. Hilton;U. Hwang;K. Irwin;R. Kelley;C. Kilbourne;S. Leman;D. McCammon;T. Okajima;F. Porter;C. Reintsema;J. Rutherford;T. Saab;P. Serlemitsos;Y. Soong;S. Trowbridge;P. Wikus
通讯作者：
P. Wikus