Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
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干涉相干傅里叶散射测量：一种在光学逆光栅问题中获得高灵敏度的方法
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
H. Urbach
中科院分区：
文献类型：
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作者：
Roy Sarathi;N. Kumar;Silvania F. Pereira;H. Urbach
近年来，相干傅里叶散射测量被认为是一种新兴的半导体计量光栅散射测量技术，因为它的扫描能力表现出很高的灵敏度。然而，通过使用时间相移干涉测量原理进行额外的测量，可以进一步利用相干性。在本文中，通过数值模拟，我们展示了如何将扫描和干涉测量结合在一起，以提高相干傅里叶散射测量的灵敏度，扩大其适用范围，并获得足够的信息来计算显微镜物镜数值孔径内所有入射角的复杂散射矩阵。
In recent times, coherent Fourier scatterometry has been considered as an emerging optical grating scatterometry technique for semiconductor metrology since it shows large sensitivity owing to its scanning ability. However, further utilization of coherence is possible by making additional measurements using the principle of temporal phase-shifting interferometry. In this paper, through numerical simulation, we show how scanning and interferometry can be coupled together to improve the sensitivity of coherent Fourier scatterometry, to extend its range of applicability and to obtain sufficient information to calculate the complex scattering matrix for all angles of incidences inside the numerical aperture of a microscope objective.
影响因子：
19.4
作者：
Paz, Valeriano Ferreras;Peterhaensel, Sandy;Osten, Wolfgang
通讯作者：
Osten, Wolfgang