Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification
Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification
复制标题
用于光刻热点分类的改进的基于切线空间的距离度量
DOI：
10.1109/tcad.2016.2638440
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发表时间：
2017-09
影响因子：
2.9
通讯作者：
Zhou Dian
中科院分区：
文献类型：
--
作者：
Yang Fan;Sinha Subarna;Chiang Charles C.;Zeng Xuan;Zhou Dian
A distance metric of patterns is crucial to hotspot cluster analysis and classification. In this paper, we propose an improved tangent space (ITS)-based distance metric for hotspot cluster analysis and classification. The proposed distance metric is an important extension of the well-developed tangent space method in computer vision. It can handle patterns containing multiple polygons, while the traditional tangent space method can only deal with patterns with a single polygon. It inherits most of the advantages of the traditional tangent space method, e.g., it is easy to compute and is tolerant with small variations or shifts of the shapes. The ITS-based distance metric is a more reliable and accurate metric for hotspot cluster analysis and classification. We also propose a hierarchical density-based clustering method for hotspot clustering. It is more suitable for arbitrary shaped clusters.
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影响因子：
4.8
作者：
Sander, J;Ester, M;Xu, XW
通讯作者：
Xu, XW
DOI：
10.1145/1065579.1065678
发表时间：
2005-06
期刊：
Proceedings. 42nd Design Automation Conference, 2005.
影响因子：
--
作者：
Joydeep Mitra;YU Peng;D. Pan
通讯作者：
Joydeep Mitra;YU Peng;D. Pan
影响因子：
3.7
作者：
T. Burr
通讯作者：
T. Burr
DOI：
10.1145/2228360.2228577
发表时间：
2012-06
期刊：
DAC Design Automation Conference 2012
影响因子：
--
作者：
Jing Guo;Fan Yang;S. Sinha;C. Chiang;Xuan Zeng
通讯作者：
Jing Guo;Fan Yang;S. Sinha;C. Chiang;Xuan Zeng
DOI：
10.1145/996566.996622
发表时间：
2004-06
期刊：
Proceedings of the 41st annual Design Automation Conference
影响因子：
--
作者：
Li-Da Huang;Martin D. F. Wong
通讯作者：
Li-Da Huang;Martin D. F. Wong