A harsh environment-oriented wireless passive temperature sensor realized by LTCC technology.
A harsh environment-oriented wireless passive temperature sensor realized by LTCC technology.
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DOI：
10.3390/s140304154
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发表时间：
2014-03-03
期刊：
影响因子：
--
通讯作者：
Zhang W
中科院分区：
文献类型：
--
作者：
Tan Q;Luo T;Xiong J;Kang H;Ji X;Zhang Y;Yang M;Wang X;Xue C;Liu J;Zhang W
针对高温、旋转等恶劣环境下的测量需求，提出了一种基于铁电介质材料的低温共烧陶瓷（LTCC）无线无源温度传感器。该传感器是由温度敏感电容和平面螺旋电感组成的LC电路，其谐振频率随温度的变化而变化。在近场耦合距离内，通过提取外接天线的阻抗参数，可以接触式地检测传感器谐振频率的变化。铁电陶瓷，它具有温度敏感的介电常数，被用作电介质。该传感器不同于传统的LTCC技术的制作过程中，详细描述。该传感器从室温到700 °C进行了三次测试，显示出相当的重复性和灵敏度，从而论证了LTCC技术实现高性能无线无源温度传感器的可行性。
To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.
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发表时间：
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影响因子：
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